Wafer-level fabrication of nanocone forests by plasma repolymerization technique for surface-enhanced Raman scattering devices

Mao, Haiyang; Huang, Chengjun; Wu, Wengang; Xue, Mei; Yang, Yudong; Xiong, Jijun; Ming, Anjie; Wang, Weibing

doi:10.1016/j.apsusc.2016.11.092

Cited by 25 publications

(9 citation statements)

References 41 publications

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“…Briefly, the samples consist of a Si-nanopillar base substrate, obtained through reactive ion etching, covered by 225 nm evaporated Ag. The resulting “nano-forest” of flexible Ag nanopillars, shown in Figure , turned out to be less hydrophobic than the gold substrates. Hence, it was easier to place and hold small water based droplets on them with good precision.…”

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confidence: 99%

Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity

et al. 2017

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Picric acid (PA) is a severe environmental and security risk due to its unstable, toxic, and explosive properties. It is also challenging to detect in trace amounts and in situ because of its highly acidic and anionic character. Here, we assess sensing of PA under nonlaboratory conditions using surface-enhanced Raman scattering (SERS) silver nanopillar substrates and hand-held Raman spectroscopy equipment. The advancing elasto-capillarity effects are explained by molecular dynamics simulations. We obtain a SERS PA detection limit on the order of 20 ppt, corresponding attomole amounts, which together with the simple analysis methodology demonstrates that the presented approach is highly competitive for ultrasensitive analysis in the field.

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confidence: 99%

Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity

et al. 2017

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“…NFs refer to a large area of nanowires with a certain height and a certain density, usually exhibit features including superhydrophilicity, light absorption, surface enhancement and so on, thus have been used in different devices [15], [16], [17].…”

Section: Design and Fabricationmentioning

confidence: 99%

A Performance Enhancement Method for MEMS Thermopile Pirani Sensors Through In-Situ Integration of Nanoforests

Shi

Zhou

et al. 2022

IEEE Electron Device Lett.

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In this letter, we report a performance 1 enhancement approach for MEMS thermopile Pirani sensors 2 through in-situ integration of nanoforests. The nanoforests 3 not only increase the light absorption of the thermopile, 4 resulting in an improved output voltage, but also increase 5 the contact area and heat exchange sites for gas molecules 6 due to their high porosity and large surface area to vol-7 ume ratio, subsequently improve the gas heat conduction, 8 extend pressure detection range and increase sensitivity 9 of the Pirani sensor. With integration of the nanoforests, 10 the lower detection limit of the sensor is widened by one 11 order of magnitude compared with the pristine sensor, and 12 the maximum increment in sensitivity reached 56.7%. More-13 over, such a sensor can be easily fabricated with a CMOS-14 compatible process, thus is suitable for mass production.

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“…1−4 Typically, conventional SERS sensors are fabricated by top-down techniques on solid substrates. 5,6 With sophisticated process control, these substrate-based platforms allow precise regulation of geometries and hot-spot locations, thus providing strong and uniform electromagnetic field distributions. 7,8 Generally, SERS substrates are used in the dry state after soaking in analyte solution or dripping droplets.…”

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confidence: 99%

“…7,8 Generally, SERS substrates are used in the dry state after soaking in analyte solution or dripping droplets. 5,7 However, detection of biomacromolecules such as DNA and proteins in the dry state is undesirable because their biological activities and functions are destroyed when dried, resulting in inaccurate detection results. 9,10 In particular, it is important that proteins are analyzed in liquid environments such as phosphatebuffered saline.…”

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confidence: 99%

“…Biochemistry and life sciences have benefited from surface-enhanced Raman scattering (SERS) technology, which is a potential and vigorous analytical approach because of its unique vibrational fingerprints and extremely high sensitivity. − Typically, conventional SERS sensors are fabricated by top-down techniques on solid substrates. , With sophisticated process control, these substrate-based platforms allow precise regulation of geometries and hot-spot locations, thus providing strong and uniform electromagnetic field distributions. , Generally, SERS substrates are used in the dry state after soaking in analyte solution or dripping droplets. , However, detection of biomacromolecules such as DNA and proteins in the dry state is undesirable because their biological activities and functions are destroyed when dried, resulting in inaccurate detection results. , In particular, it is important that proteins are analyzed in liquid environments such as phosphate-buffered saline …”

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confidence: 99%

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Self-Concentrated Surface-Enhanced Raman Scattering-Active Droplet Sensor with Three-Dimensional Hot Spots for Highly Sensitive Molecular Detection in Complex Liquid Environments

Gui

Mao

et al. 2020

ACS Sens.

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In this work, a surface-enhanced Raman scattering (SERS)-active droplet with three-dimensional (3D) hot spots prepared from a superhydrophobic SERS substrate, which is inspired by the nut wizard strategy, was developed for ultrasensitive detection in complex liquid environments. The SERS substrate was composed of silver-capped parylene C-coated carbon nanoparticles (Ag-PC@CNPs). Such a SERS substrate was prepared by candle-soot deposition to provide a porous carbon nanoparticle layer followed by deposition of a parylene C film to protect the CNPs and then sputtering of silver nanoparticles. Similar to a nut wizard, a droplet

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Wafer-level fabrication of nanocone forests by plasma repolymerization technique for surface-enhanced Raman scattering devices

Cited by 25 publications

References 41 publications

Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity

Hand-Held Femtogram Detection of Hazardous Picric Acid with Hydrophobic Ag Nanopillar SERS Substrates and Mechanism of Elasto-Capillarity

A Performance Enhancement Method for MEMS Thermopile Pirani Sensors Through In-Situ Integration of Nanoforests

Self-Concentrated Surface-Enhanced Raman Scattering-Active Droplet Sensor with Three-Dimensional Hot Spots for Highly Sensitive Molecular Detection in Complex Liquid Environments

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