Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering

Le‐The, Hai; Lozeman, Jasper J.A.; Lafuente, Marta; Muñoz, Pablo; Bomer, Johan G.; Duy-Tong, Hien; Berenschot, Erwin; Berg, Albert van den; Tas, Niels Roelof; Odijk, Mathieu; Eijkel, Jan C.T.

doi:10.1039/c9nr02215e

Cited by 23 publications

(25 citation statements)

References 42 publications

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“…By using the UV-ozone treatment, we could fabricate high-quality tunable Au nanogap arrays for SERS application, without the need of metallic adhesion layers. 34 In addition, we believe that our proposed adhesion mechanism could also play a role in the adhesion of plasmonic nanoparticles fabricated by means of rapid focused ion beam milling reported by Chen et al . 35 Finally, the successful patterning of Au nanostructures on SiN-coated Si substrates, sapphire glass substrates, MEMpax glass substrates, and ITO-coated MEMpax glass substrates indicates that the postdeposition UV-ozone treatment might also provide good adhesion of the Au to these substrate materials.…”

Section: Resultsmentioning

confidence: 62%

Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon

et al. 2019

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We found that continuous films of gold (Au) on oxidized silicon (SiO2) substrates, upon treatment with ultraviolet (UV)-ozone, exhibit strong adhesion to the SiO2 support. Importantly, the enhancement is independent of micro- or nanostructuring of such nanometer-thick films. Deposition of a second Au layer on top of the pretreated Au layer makes the adhesion stable for at least 5 months in environmental air. Using this treatment method enables us to large-scale fabricate various SiO2-supported Au structures at various thicknesses with dimensions spanning from a few hundreds of nanometers to a few micrometers, without the use of additional adhesion layers. We explain the observed adhesion improvement as polarization-induced increased strength of Auδ−Siδ+ bonds at the Au–SiO2 interface due to the formation of a gold oxide monolayer on the Au surface by the UV-ozone treatment. Our simple and enabling method thus provides opportunities for patterning Au micro/nanostructures on SiO2 substrates without an intermediate metallic adhesion layer, which is critical for biosensing and nanophotonic applications.

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Section: Resultsmentioning

confidence: 62%

Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon

et al. 2019

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“…Raman spectra were recorded at the edge of the droplet. 63 It should be noted that 1 mM concentration is meant for AEF estimation and does not correlate to the Au-HNPs detection limit. Information about the Au-HNP limit of detection for MB can be found in Figure S13 and S14.…”

Section: Analytical Enhancement Factor Using Raman Spectroscopy Of Functionalized Au Nanopillarsmentioning

confidence: 99%

“…57,58 Such assets are important to the field of nanoelectronics, 59 nanosensing, [60][61][62] and nanofluidics. 63,64 Our DTL/SHL method employs a single photoresist and two exposure techniques to generate a nanopatterned photoresist and bottom anti-reflective coating (BARC) in the form of nanopillar-like structures at particular substrate locations. These nanopillars render as a template for the sidewall redeposition of Au during angled ion beam etching (IBE).…”

Section: Introductionmentioning

confidence: 99%

A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars

et al. 2021

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“…SEIRAS, first observed by Hartstein et al 6 in the 1980's and further pioneered by the group of Osawa in the 1990's 7,8 , is a technique often compared with surface enhanced Raman spectroscopy (SERS), although there are some distinct differences. These differences are most notable when comparing the enhancement factors of the two techniques, for SERS [9][10][11] , enhancement factors of up to 10 10 have been achieved, while reported SEIRAS enhancement factors 12,13 are more modest, in the range of 10 1-5 . SEIRAS substrates can be roughly categorized in two different groups, namely substrates consisting of roughened metallic films, or so called resonantly tuned nanoantennas.…”

Section: Introductionmentioning

confidence: 97%

Large-area fabrication of Au nanoantennas for surface enhanced infrared spectroscopy without an adhesion layer

Lozeman

Srivastava

Le‐The

et al. 2020

Enhanced Spectroscopies and Nanoimaging 2020

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This work reports the fabrication of large-area Au nanoantennas, tuned to 1400cm-1 , on a Si substrate for surfaceenhanced-infrared-absorption-spectroscopy. Two different kinds of nanoantennas are fabricated, namely nano-rods and nano-slits. Fabrication is achieved by E-beam lithography (EBL). The need for an adhesion layer is eliminated using our previously reported UV-ozone pre-treatment 1. To our knowledge, this is the first time this technique is used to fabricate Au nanoantennas on Si without the need adhesion layer, while at the same time obtaining a strong adhesion. This UVozone treatment does not only speed up the fabrication process, it can potentially increase the enhancement quality due to the negative influence metallic adhesion layers can have on the plasmon resonance of Au nanoantennas 2-4. Next to using the standard positive resist for EBL lithography, we also propose a workflow using a negative photoresist to make the nano-rod antennas, potentially speeding up the process by skipping the lift off procedure. Although the negative photoresist fabrication process still requires optimization, our first fabrication attempt show promising results. In order to get the optimal enhancement for a given wavelength, we used FTDT simulations to simulate the structure length, height, width and pitch. After successful simulations, the structures were fabricated and a comparison between the simulated results and fabricated structures was made, confirming the simulation results.

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Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering

Abstract: A robust method is developed for large-scale fabrication of high-quality tunable gold nanogap arrays at low-cost for surface-enhanced Raman scattering.

Cited by 23 publications

References 42 publications

Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon

Postdeposition UV-Ozone Treatment: An Enabling Technique to Enhance the Direct Adhesion of Gold Thin Films to Oxidized Silicon

A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars

Large-area fabrication of Au nanoantennas for surface enhanced infrared spectroscopy without an adhesion layer

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