Wafer‐Scale Single‐Crystalline Ferroelectric Perovskite Nanorod Arrays

Abstract

1D ferroelectric nanostructures are promising for enhanced ferroelectric and piezoelectric performance on the nanoscale, however, their synthesis at the wafer scale using industrially compatible processes is challenging. In order to advance the nanostructure-based electronics, it is imperative to develop a silicon-compatible growth technique yielding high volumetric density and an ordered arrangement. Here, a major breakthrough is provided in addressing this need and ordered and close-packed single crystalline ferroelectric nanorod arrays, of composition PbZr 0.52 Ti 0.48 O 3 (PZT), grown on commercial grade 3 in. silicon wafer are demonstrated. PZT nanorods exhibit enhanced piezoelectric and ferroelectric performance compared to thin films of similar dimensions. Sandwich structured architecture utilizing 1D PZT nanorod arrays and 2D reduced graphene oxide thin film electrodes is fabricated to provide electrical connection. Combined, these results offer a clear pathway toward integration of ferroelectric nanodevices with commercial silicon electronics.

Wearable Piezoelectric Nanogenerators Based on Core–Shell Ga-PZT@GaOx Nanorod-Enabled P(VDF-TrFE) Composites

“…Moreover, the distribution of the PZT nanorods became more and more dense as the mass ratio of PZT/P­(VDF-TrFE) increased from 1:20 to 1:3. The XRD patterns presented in Figure S3a show the coexistence of tetragonal PZT and the β-phase of P­(VDF-TrFE) in the composite . The FT-IR spectra in Figure S3b and the corresponding variation of β-phase contents with the influence of the PZT/P­(VDF-TrFE) mass ratio shown in Figure S3c were confirmed.…”

“…The XRD patterns presented in Figure S3a show the coexistence of tetragonal PZT and the β-phase of P(VDF-TrFE) in the composite. 46 The FT-IR spectra in Figure S3b and the corresponding variation of β-phase contents with the influence of the PZT/P(VDF-TrFE) mass ratio shown in Figure S3c were confirmed. It was found that the β-phase content increased from 62% to 70.5% when the mass ratio of PZT/P(VDF-TrFE) was 1:10, indicating the piezoelectric ceramic filler's nucleation role in the P(VDF-TrFE).…”