2015
DOI: 10.3390/polym7060985
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Warpage Analysis of Electroplated Cu Films on Fiber-Reinforced Polymer Packaging Substrates

Abstract: This paper presents a warpage analysis method that predicts the warpage behavior of electroplated Cu films on glass fiber-reinforced polymer (GFRP) packaging substrates. The analysis method is performed using the following sequence: fabricate specimens for scanning 3D contours, transform 3D data into curvatures, compute the built-in stress of the film using a stress-curvature analytic model, and verify it through comparisons of the finite element method (FEM) simulations with the measured data. The curvature i… Show more

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Cited by 28 publications
(8 citation statements)
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“…The curvature of the EMC/Cu bi-layer package was measured according to temperature using 3D-DIC (ARAMIS, GOM, Germany). 37 The EMC/Cu bi-layer package was sprayed with a white ceramic pattern for tracking patterns using the DIC method in the same way as the modulus measurement.…”
Section: Effective Cure Shrinkage (Ecs) Of the Emcmentioning
confidence: 99%
“…The curvature of the EMC/Cu bi-layer package was measured according to temperature using 3D-DIC (ARAMIS, GOM, Germany). 37 The EMC/Cu bi-layer package was sprayed with a white ceramic pattern for tracking patterns using the DIC method in the same way as the modulus measurement.…”
Section: Effective Cure Shrinkage (Ecs) Of the Emcmentioning
confidence: 99%
“…The technique offers a better value compare to a conventional probe gauge where an accurate measurement is difficult to achieve in deformed or curved surfaces. Furthermore, this method was suggested by researchers as an efficient way to capture features detail in short time whether in small or large scale [35].…”
Section: Surface Deformationmentioning
confidence: 99%
“…Furthermore, this method was suggested by researchers as an efficient way to capture features detail in short time. 18 GOM inspect was used as a software to analyse the maximum deformation of each specimen. Gaussian best fit virtual plan method was used to construct the reference to measure the level.…”
Section: Surface Deformation Measurementmentioning
confidence: 99%