Water-assisted femtosecond laser drilling of 4H-SiC to eliminate cracks and surface material shedding

Wang, Wenjun; Song, Hongwei; Liao, Kai-Hsiu; Mei, Xuesong

doi:10.1007/s00170-020-06262-1

Cited by 37 publications

(12 citation statements)

References 27 publications

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“…The slags affected the precision of the dimple size and the growth of nanotubes. To prevent this problem, processing the samples under vacuum conditions and utilizing water [70] , alcohol [71] , or other media during processing produces cleaning and cooling effects of liquids, which may help for high-quality processing.…”

Section: Discussionmentioning

confidence: 99%

Texturing the optimal wear-resistance micro/nano hierarchical structure for drug loading on titanium implants

Yang

Yanfang

Zhou

et al. 2023

Preprint

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This paper aimed to texture a drug-loaded structure on the surface of the titanium implant. Firstly, ABAQUS software was used to construct the implant placement model and to calculate the imposed forces on the implant during placement. Then the femtosecond laser-machined microstructures were subjected to friction testing to select the most wear-resistant shape, and the structural parameters of the shape were optimized. A micro/nano hierarchical structure was developed on the surface of the titanium disc and commercial implant through anodization. The morphology and tribological properties were studied precisely. The results show that laser-textured dimple shapes reduced the contact area and stored wear debris, improving the wear resistance of the surface. The shape with a diameter of 150 μm, depth of 80 μm, and texture density of 5% exhibited high resistance against wear during implant insertion. In-vitro study using fresh porcine mandibles showed that TiO2 nanotubes inside the dimples remain intact after implant placement. In addition, the micro/nano hierarchical structure exhibited excellent wettability, promising for drug loading. The designed drug-loaded structure protects the original surface of the implant, which can safeguard the surface modifications of all commercial implants used clinically currently. The presented approach can improve the implant success rate in patients with bone metabolic clinical conditions.

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Section: Discussionmentioning

confidence: 99%

Texturing the optimal wear-resistance micro/nano hierarchical structure for drug loading on titanium implants

Yang

Yanfang

Zhou

et al. 2023

Preprint

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“…[1][2][3][4][5][6] The wide band gap, high limit operating temperature and thermal conductivity, high breakdown electric field strength, excellent oxidation and neutron irradiation resistance, corrosion and wear resistance, which makes SiC becoming promising material in harsh environment. [7][8][9][10] The thermal expansion coefficient and lattice constant of single-crystal SiC are similar to those of gallium nitride (GaN), which effectively solves the problem of low lattice matching between substrate materials and gallium nitride.…”

Section: Introductionmentioning

confidence: 99%

Mechanism of chemical and mechanical mutual promotion in photocatalysis-assisted chemical mechanical polishing for single-crystal SiC

Yuan

Tang

et al. 2022

Proceedings of the Institution of Mechanical Engineers, Part C:

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Single-crystal SiC has become the third-generation semiconductor material with the most development potential due to its many outstanding physical and chemical properties, but excellent surface quality is the prerequisite for its application. Therefore, atomic mechanism of chemical and mechanical mutual promotion in hydroxyl radical ·OH aqueous was researched through reactive molecular dynamics simulation for obtaining nano-smoothed surface with photocatalysis-assisted chemical mechanical polishing (PCMP). The behavior of nanoparticles promoting chemical reaction during the nanofinishing process was studied vias a single abrasive sliding on the surface of SiC. A combination method of mechanical action and chemical action was adopted to compare effect of material oxidation and material removal. Si/C atoms are mainly fractured or escaped in the forms of SiO, CO, chain, SiO2, and CO2, and more residual oxidation products were observed on the substrate. Furthermore, XPS and nanoindentation results also support the mechanism of chemical and mechanical mutual promotion in PCMP through the detection of the oxidized products and surface hardness. This process activated and removed the SiC materials and generated a smooth and non-damaged surface (Ra 0.269 nm and Rmax 0.807 nm). The research results may reveal the removal mechanism of Si/C atoms, and provide new theoretical and technical support for the ultra-precision machining of single crystal sapphire, silicon nitride and diamond etc.

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“…Therefore, the ablation threshold reduction is closely related to the liquid with different properties. In addition, Wang et al also prepared high-quality silicon carbide through-hole arrays without cracks and heat-affected zones by water-assisted femtosecond laser ablation technique, which is essential for the high-quality processing of silicon carbide electronic devices ( Wang et al, 2021 ).…”

Section: Introductionmentioning

confidence: 99%

Femtosecond laser hybrid processing strategy of transparent hard and brittle materials

et al. 2022

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With high hardness, high thermal stability, chemical inertness and excellent optoelectronic properties, transparent hard and brittle materials have drawn significant attentions in frontier domains such as aerospace, photoelectric detection, and high-intensity lasers. Femtosecond laser processing technology demonstrates great potential for transparent hard and brittle materials processing due to its outstanding advantages such as non-contact, true 3D processing and programmable design. However, high-energy laser ablation usually causes severe damage to the surface of the materials, resulting in low processing accuracy, low processing efficiency and poor surface quality. Femtosecond laser hybrid processing strategies have been proven to be an effective solution to solve the above problems. This mini-review summarizes the fundamentals and research progress of femtosecond laser hybrid processing strategies of transparent hard and brittle materials in recent years. Moreover, the challenges and application prospects of these techniques are discussed.

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Water-assisted femtosecond laser drilling of 4H-SiC to eliminate cracks and surface material shedding

Cited by 37 publications

References 27 publications

Texturing the optimal wear-resistance micro/nano hierarchical structure for drug loading on titanium implants

Texturing the optimal wear-resistance micro/nano hierarchical structure for drug loading on titanium implants

Mechanism of chemical and mechanical mutual promotion in photocatalysis-assisted chemical mechanical polishing for single-crystal SiC

Femtosecond laser hybrid processing strategy of transparent hard and brittle materials

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