Wavefront Sensing by Phase and Modal Amplitude Retrieval

Moore, Dustin B.; Fienup, James R.

doi:10.1364/aopt.2013.otu1a.4

Cited by 3 publications

(5 citation statements)

References 10 publications

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“…3, represent a hard-edged vignetting surface. This capability was also observed by the simulations in [33].…”

Section: Laboratory Experimentssupporting

confidence: 78%

“…The amplitude of the fixed pupil, A F , was allowed to vary in a pixel-by-pixel manner, as in classic TTDPR, to recover the fixed pupil effects of the additional hard-edged aperture. However, the resulting estimates for pupil amplitude were corrupted by salt-and-pepper noise to an unacceptable extent, as in [33]. We have found this failure mode to be typical of pixel-by-pixel amplitude retrieval involving a single plane very near focus, and other work has encountered similar challenges, as mentioned in Section 2.…”

Section: Laboratory Experimentsmentioning

confidence: 70%

“…Amplitudes with smoothly varying features can occur when the beam is vignetted by a surface that is not in the plane of the subaperture or due to the effects of a resolved, coherently, or partially coherently illuminated target. We have observed that a fixed amplitude model parameterized by coefficients of a Zernike polynomial can retrieve both smoothly-varying and hard-edged fixed amplitudes [33]. As in [33], we here model the fixed amplitude at array pixel n r ; n c by…”

Section: Discrete Model and Error Metricmentioning

confidence: 99%

“…We have observed that a fixed amplitude model parameterized by coefficients of a Zernike polynomial can retrieve both smoothly-varying and hard-edged fixed amplitudes [33]. As in [33], we here model the fixed amplitude at array pixel n r ; n c by…”

Section: Discrete Model and Error Metricmentioning

confidence: 99%

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Ptychography for optical metrology with limited translation knowledge

Moore

Fienup

2016

Appl. Opt.

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We introduce unknown-transverse translation diversity phase retrieval: a ptychographic algorithm for optical metrology when a subaperture is translating through a plane conjugate to the exit pupil in a very poorly known fashion. The algorithm estimates the direction of translation and the distance traveled by the subaperture from one point spread function (PSF) to the next. It also estimates unknown point target motion and rotations of the subaperture between PSF acquisitions from the PSF data.

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“…3, represent a hard-edged vignetting surface. This capability was also observed by the simulations in [33].…”

Section: Laboratory Experimentssupporting

confidence: 78%

Section: Laboratory Experimentsmentioning

confidence: 70%

Section: Discrete Model and Error Metricmentioning

confidence: 99%

Section: Discrete Model and Error Metricmentioning

confidence: 99%

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Ptychography for optical metrology with limited translation knowledge

Moore

Fienup

2016

Appl. Opt.

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“…However, aspheric optical elements are very difficult to test due to their different internal curvature radii. CGH is the commonly used null interferometry in interferometric testing [ 14 ], but it also faces several problems: the mode of one-to-one compensation measurement causes its poor measurement versatility, so the testing cost is high. For curved surface components with large gradients, CGH, as a compensator, needs to achieve the output of a large gradient wavefront through a diffraction structure with high density, so the groove density of CGH is limited by the current level of microstructure processing technology.…”

Section: Introductionmentioning

confidence: 99%

Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing

Ma,

Wang,

Wang

et al. 2023

Micromachines

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Complex optical elements have the advantages of improving image quality and optical performance and expanding the field of view. Therefore, it is widely used in X-ray scientific devices, adaptive optical elements, high-energy laser systems, and other fields and is a hot research direction in precision optics. Especially for precision machining, there is a greater need for high-precision testing technology. However, how to measure complex surfaces efficiently and accurately is still an important research topic in optical metrology technology. In order to verify the ability of optical metrology for complex optical surfaces with wavefront sensing based on image information of the focal plane, some experiment platforms in different types of optical surfaces were set up. In order to validate the feasibility and validity of wavefront-sensing technology based on image information of focal planes, a large number of repetitive experiments were carried out. The measurement results with wavefront sensing based on image information of the focal plane were compared with the measurement results with the ZYGO interferometer. The experimental results demonstrate that good agreement is obtained among the error distribution, PV value, and RMS value of the ZYGO interferometer, which shows the feasibility and validity of wavefront sensing based on image information of focal plane technology in optical metrology for the complex optical surface.

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Transverse translation diversity wavefront sensing with limited position and pupil illumination knowledge

Moore

Fienup

2014

SPIE Proceedings

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Wavefront Sensing by Phase and Modal Amplitude Retrieval

Cited by 3 publications

References 10 publications

Ptychography for optical metrology with limited translation knowledge

Ptychography for optical metrology with limited translation knowledge

Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing

Transverse translation diversity wavefront sensing with limited position and pupil illumination knowledge

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