WGP structures patterned by Lloyd's mirror laser interference lithography system integrate into MEMS physical sensor device

Tseng, Kuo-Hung; Hong, Shuo-Ting; Lin, Te-Hsun; Chuang, Tzu-Han; Fu, Chien-Chung

doi:10.1117/12.2211917

Cited by 1 publication

(3 citation statements)

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“…Suppose the initial position deviation is p 0 from the desired position, and the angle deviation is a 0 . The weighted iteration can be described by a matrix as (1) and (2)…”

Section: D2mentioning

confidence: 99%

“…The position deviation is acquired by a position PSD, and the angle deviation is acquired by an angle PSD. During the alignment process, the angle overshoot relative to the reference angle is defined as a (1,1) , and the position overshoot is p (1,2) . Equation (1) and (2)…”

Section: D2mentioning

confidence: 99%

“…Periodic micro/nanostructures have numerous applications, such as photonic crystals [1], liquid crystal displays [2], solar cells [3,4], high density data storage [5,6], and biosensors [7,8]. A number of technologies have been utilized to fabricate periodic structures, including interference lithography [9], nanoimprinting [10,11], electron beam lithography [12,13], focused ion beam etching [14], and direct laser writing [15][16][17].…”

Section: Introductionmentioning

confidence: 99%

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Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography

Song

Bayanheshig

et al. 2019

Photonic Sens

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To obtain a good interference fringe contrast and high fidelity, an automated beam iterative alignment is achieved in scanning beam interference lithography (SBIL). To solve the problem of alignment failure caused by a large beam angle (or position) overshoot exceeding the detector range while also speeding up the convergence, a weighted iterative algorithm using a weight parameter that is changed linearly piecewise is proposed. The changes in the beam angle and position deviation during the alignment process based on different iterative algorithms are compared by experiment and simulation. The results show that the proposed iterative algorithm can be used to suppress the beam angle (or position) overshoot, avoiding alignment failure caused by over-ranging. In addition, the convergence speed can be effectively increased. The algorithm proposed can optimize the beam alignment process in SBIL.

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“…Suppose the initial position deviation is p 0 from the desired position, and the angle deviation is a 0 . The weighted iteration can be described by a matrix as (1) and (2)…”

Section: D2mentioning

confidence: 99%