a b s t r a c tGaAs-based triple-junction tandem solar cells incorporating an antireflection coating (ARC) consisting of a subwavelength structure (SWS) and bilayer thin films are reported. A high aspect ratio SWS was realized on polymethyl methacrylate (PMMA) using a two-step etched silicon template and a stamping method. The fabricated PMMA SWS consisting of a two-dimensional array of nanoscale needles with a period of 300 nm and an aspect ratio exceeding 2.3 exhibited significantly improved optical performance. The average reflectance of the PMMA SWS was reduced from 7.1 to 4.4% as compared to that of the bare PMMA film, which resulted in an improvement of the transmittance from 90.7 to 92.9% in the wavelength range between 300 and 1700 nm. By integrating the PMMA SWS together with a TiO 2 /Al 2 O 3 bilayer AR coating onto the top of an InGaP/GaAs/Ge triple-junction solar cell, the surface reflection of the solar cell could be minimized. The integrated PMMA SWS on the bilayer thin film ARC enhanced the powerconversion efficiency (Á) of the triple-junction solar cell from 30.2 to 31.6% and from 37.8 to 40.8% under 1 and 157 sun condition, respectively.