Widely Tunable MEMS-Based Fabry–Perot Filter

Milne, Jason; Dell, John; Keating, Adrian; Faraone, Lorenzo

doi:10.1109/jmems.2009.2024793

Cited by 108 publications

(44 citation statements)

References 25 publications

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“…Nevertheless, for system integration, it is desirable to actuate with lower voltages, as we have achieved for similar actuation geometries (for example, actuation under 24 V (Ref. 49) or 8 V (Ref. 50)).…”

Section: Resultsmentioning

confidence: 86%

Ultrathin tunable terahertz absorber based on MEMS-driven metamaterial

et al. 2017

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The realization of high-performance tunable absorbers for terahertz frequencies is crucial for advancing applications such as single-pixel imaging and spectroscopy. Based on the strong position sensitivity of metamaterials' electromagnetic response, we combine meta-atoms that support strongly localized modes with suspended flat membranes that can be driven electrostatically. This design maximizes the tunability range for small mechanical displacements of the membranes. We employ a micro-electromechanical system technology and successfully fabricate the devices. Our prototype devices are among the best-performing tunable THz absorbers demonstrated to date, with an ultrathin device thickness (~1/50 of the working wavelength), absorption varying between 60% and 80% in the initial state when the membranes remain suspended, and fast switching speed (~27 μs). The absorption is tuned by an applied voltage, with the most marked results achieved when the structure reaches the snap-down state. In this case, the resonance shifts by 4200% of the linewidth (14% of the initial resonance frequency), and the absolute absorption modulation measured at the initial resonance can reach 65%. The demonstrated approach can be further optimized and extended to benefit numerous applications in THz technology.

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Section: Resultsmentioning

confidence: 86%

Ultrathin tunable terahertz absorber based on MEMS-driven metamaterial

et al. 2017

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“…또한, 건물이나 다리와 같은 구조물의 변형 유무를 검사하거나 습 도나 온도 등의 외부 환경 변화를 감지하기 위한 센서 그리 고 의료용 OCT와 같은 다양한 분야에 적용되고 있다 [3][4][5] . 파장 필터를 구현하기 위한 방법으로 박막 구조 [6][7][8] , 패브 리 페로 구조 [9,10] , 그리고 광섬유 격자 구조 [11,12] 등을 이 …”

Section: 서 론unclassified

Polymer Waveguide Apodized Grating for Narrow-Bandwidth High-Reflectivity Wavelength Filters

Lee¹,

Huang²,

Shin³

et al. 2015

Korean Journal of Optics and Photonics

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Wavelength filters are essential components for selecting a certain wavelength channel of a WDM optical communication system. To realize wavelength filters with narrow bandwidth and high reflectivity, an apodized grating structure with length of 15 mm and index modulation of 5×10 -4 was designed. The device exhibited a reflectivity of 95%, 3-dB bandwidth of 0.28 nm, and 20-dB bandwidth of 0.70 nm on an 18 mm grating length.

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“…2(a). Several research groups have reported miniaturized light sources [18][19][20], optical filters [17,[21][22][23][24][25][26][27][28], and detectors [29,30]. However, the sample cell which is used for storing the sample gas occupies a large part of the microspectrometer.…”

Section: Introductionmentioning

confidence: 99%

Compact gas cell integrated with a linear variable optical filter

2016

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A miniaturized methane (CH 4 ) sensor based on nondispersive infrared absorption is realized in MEMS technology. A high level of functional integration is achieved by using the resonance cavity of a linear variable optical filter (LVOF) also as a gas absorption cell. For effective detection of methane at λ = 3.39 µm, an absorption path length of at least 5 mm is required. Miniaturization therefore necessitates the use of highly reflective mirrors and operation at the 15th-order mode with a resonator cavity length of 25.4 µm. The conventional description of the LVOF in terms of the Fabry-Perot resonator is inadequate for analyzing the optical performance at such demanding boundary conditions. We demonstrate that an approach employing the Fizeau resonator is more appropriate. Furthermore, the design and fabrication in a CMOS-compatible microfabrication technology are described and operation as a methane sensor is demonstrated. 1-3), 191-197 (2000). 604-606 (1990). 42. T. T. Kajava, H. M. Lauranto, and R. R. E. Salomaa, "Fizeau interferometer in spectral measurements," J. Opt. ©2016 Optical Society of AmericaSoc. Am. B 10(11), 1980-1989 (1993). 43. P. Langenbeck, "Fizeau interferometer-fringe sharpening," Appl. Opt. 9(9), 2053-2058 (1970) Characteristics," Appl. Opt. 6(8), 1343-1351 (1967). 49. J. Altmann, R. Baumgart, and C. Weitkamp, "Two-mirror multipass absorption cell," Appl. Opt. 20(6), 995-999 (1981

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Widely Tunable MEMS-Based Fabry–Perot Filter

Cited by 108 publications

References 25 publications

Ultrathin tunable terahertz absorber based on MEMS-driven metamaterial

Ultrathin tunable terahertz absorber based on MEMS-driven metamaterial

Polymer Waveguide Apodized Grating for Narrow-Bandwidth High-Reflectivity Wavelength Filters

Compact gas cell integrated with a linear variable optical filter

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