Working pressure induced structural and mechanical properties of nanoscale ZrN∕W2N multilayered coatings

ZrB 2 /ZrAlN multilayered coatings with various modulation ratios (t ZrB2 : t ZrAlN ) and constant modulation periods were prepared by magnetron sputtering system at room temperature. SEM, XRD, surface profiler and nano-indenter were employed to investigate the influences of t ZrB2 : t ZrAlN on the microstructure and mechanical properties of the coatings. Sharp interfaces and nanoscale multilayered modulation were confirmed by SEM. The multilayer with modulation period of 40 nm and ratio of 3:1 displayed the highest hardness (36.4 GPa) and critical fracture load (76.477 mN) with lower stress. The polycrystalline structure and multilayered modulate structure were directly responsible for the enhanced mechanical properties. ZrB2/ZrAlN multilayered coating, magnetron sputtering, modulation ratio, nanoscaleCitation: Li D J, Kang Y B, Dong L, et al. Influence of modulation ratio on structure and properties of nanoscale ZrB2/ZrAlN multilayered coatings. Sci China Tech Sci, 2010, 53: 772775, doi: 10.1007/s11431-009-0241-y In recent years, owing size-effect of nano-structured materials, there has been an increasing interest in applying proper multilayered coatings which possess superhardness effect to protect cutting tools [1, 2]. Multilayer coatings made of two different kinds of materials such as metal/metal, metal/ nitride, oxide/oxide and nitride/nitride stacks have been developed in recent years, and they can provide superior electrical, optical, mechanical and chemical properties as compared to single layer coatings [25]. For mechanical applications, the nitride/nitride multilayers, including TiN/AlN, AlN/CrN, CrN/NbN, TiN/NbN, TiN/TaN, TiN/W, TiAlN/CrN x , and TiN/Ti(C,N) multilayer coatings, are the most common candidates owing to their high hardness, chemical inertness and toughness [614]. It is suggested that these nitride/nitride multilayer systems would enhance the hardness of a surface in the as-deposited state, and would exhibit excellent oxidation resistance at elevated temperature. So, these multilayer systems with the stable bilayer structure have the ability to be developed and applied to various kinds of cutting tool protection to enhance their lifetime and efficiency. In our previous works [1517], we synthesized ZrNbased multilayered coatings such as ZrN/TiAlN, ZrN/W 2 N, and ZrN/W. In this investigation, we worked with ZrB 2 / ZrAlN multilayered coatings synthesized by magnetron sputtering. Compared with our previous ZrN-based multilayer systems, both single layers in this multilayer system have high melting temperature and hardness at room temperature firstly. Then, they have different structures (hexagonal for ZrB 2 and face-centered-cubic for ZrAlN), which lower mismatch between the (111) planes of ZrAlN and the (001) planes of ZrB 2 can induce a relatively low energy interface, providing a substantial barrier to dislocation motion. Thirdly, addition of Al to the ZrN to form ZrAlN is expected to improve the resistance to oxidation and hence the high-temperature stability. In this work, we empl...

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“…The schematic diagram of this system can be found in our previous work [17]. The ZrB 2 and ZrAl disks were used as targets.…”

Section: Methodsmentioning

confidence: 99%

Influence of modulation ratio on structure and properties of nanoscale ZrB2/ZrAlN multilayered coatings

Kang

Dong

et al. 2010

Sci. China Technol. Sci.

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“…The description of the IBAD system can be found in a previous article by one of the present authors and coworkers [11], was used to synthesize ZrN/(Ti, Al)N multi-layered coatings on an Si (100) wafer. Through computer control, the Zr and Ti(50 %)Al(50 %) targets could be rotated to the sputtered working position and the targets could be adjusted by alternately time exposing them to the sputtering Ar þ beam to obtain a *Corresponding author: College of Physics and Electronic Information Science, Tianjin Normal University, 393#, Bin Sui Xi Road, Tianjin, 300387, People's Republic of China.…”

Section: Methodsmentioning

confidence: 99%

“…However, both available monolithic materials largely limit the properties and performance of hard coatings owing to the predominant columnar grain growth and compressive stress accumulation with increase in the film thickness which lead to brittle fracture, delamination, and plastic deformation in application. Recently, polycrystalline nitride nanoscale multi-layered coatings with enhanced mechanical properties such as hardness and toughness have been prepared with the right material combination and coating structures in previous work by the present authors and co-workers and by other groups [6,[8][9][10][11][12]. However, there have been few studies on the relationship between the microstructure and the mechanical properties of ZrN/(Ti, Al)N multi-layered coating in the recent literatures.…”

Section: Introductionmentioning

confidence: 95%

Synthesis of nanometre multi-layered ZrN/(Ti,Al)N coatings by ion-beam-assisted deposition

Cao

Dong

Liu

et al. 2008

Proceedings of the Institution of Mechanical Engineers, Part N:

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ZrN/(Ti, Al)N nanometre multi-layered coatings with different modulation ratios and ion beam fluxes have been synthesized by ion-beam-assisted deposition at room temperature. X-ray diffraction (XRD), a nano indenter, and a profiler were used to characterize the microstructure and mechanical properties of the coatings. The small-angle XRD pattern indicated a well-defined composition modulation and layer structure. The XRD pattern showed a significant mixture of strong ZrN (111) and (Ti, Al)N(111) textures. At an assisted beam flux of 5 mA and modulation ratio of 2:3, the ZrN/(Ti, Al)N multi-layer possessed the highest hardness (30.1 GPa) and elastic modulus (361 GPa). Its fracture resistance, and residual stress also showed the best results.

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“…Superhard and wear resistant coatings have been used in cutting and forming tools in order to increase resistance against wear and improve the lifetime of tools and machine parts for many years [1][2]. It is well known that transition metal nitrides have high hardness, high melting point and strong abrasion resistance characteristic [3][4][5]. NbN coatings are of increasing interest because of their extremely high hardness.…”

Section: Introductionmentioning

confidence: 99%

Influence of Sputtering Power on the Structure and Mechanical Properties of Zr-Nb-N Nanocomposite Coatings Prepared by Multi-Target Magnetron Co-Sputtering

Zhang

Dong

et al. 2013

KEM

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Ternary Zr-Nb-N nanocomposite coatings were synthesized on Si(100) substrates by Multi-target Magnetron Co-sputtering. The structure and chemical composition and binding energy of coatings were characterized by X-ray diffractometry (XRD) and Energy-dispersive X-ray spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS). The results of measurements of Nano Indenter indicated that the maximum hardness was up to 36 GPa and elastic modulus was close to 425 GPa at the 30 W of Zr power and 120 W of NbN power. The hardest coating also showed the modest residual stress. These Zr-Nb-N coatings appeared to be a promising composite coating system suitable for engineering applications.

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Working pressure induced structural and mechanical properties of nanoscale ZrN∕W2N multilayered coatings

Cited by 24 publications

References 12 publications

Influence of modulation ratio on structure and properties of nanoscale ZrB2/ZrAlN multilayered coatings

Influence of modulation ratio on structure and properties of nanoscale ZrB2/ZrAlN multilayered coatings

Synthesis of nanometre multi-layered ZrN/(Ti,Al)N coatings by ion-beam-assisted deposition

Influence of Sputtering Power on the Structure and Mechanical Properties of Zr-Nb-N Nanocomposite Coatings Prepared by Multi-Target Magnetron Co-Sputtering

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