Proceedings IEEE Micro Electro Mechanical Systems. 1995
DOI: 10.1109/memsys.1995.472576
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Working principle and performance of the dynamic micropump

Abstract: Dynamic micropumps employing pyramid-trunc shaped diffusers as dynamic passive valves have been developed, built and tested. They are particularly characterized by a very simple fabrication technology and good high frequency performance. A prototype being 5*5*lmm3 in size reached with methanol a Lero load pump rate of more than 300plimin and a maximum pump pressure of about 7kPa at 5kHz working frequency. Dynamic micropumps can, therefore, compete with known solutions of similar or even bigger size. Thc dircct… Show more

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Cited by 55 publications
(58 citation statements)
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“…Conventional valves in microfluidics systems are subject to mechanical failure and, in the case of biological fluids, present further risk of malfunction due to clogging or to damage sensitive biomolecules. Current valveless pumping techniques mainly consist of peristaltic [2][3][4][5] and reciprocating diaphragm pumps relying on diffusers [6][7][8][9][10]. These systems are often fabricated on a substrate through the use of soft lithography on polymeric materials because they are flexible and allow the form and features of these devices to be created and remain functionally sound.…”
Section: Introductionmentioning
confidence: 99%
“…Conventional valves in microfluidics systems are subject to mechanical failure and, in the case of biological fluids, present further risk of malfunction due to clogging or to damage sensitive biomolecules. Current valveless pumping techniques mainly consist of peristaltic [2][3][4][5] and reciprocating diaphragm pumps relying on diffusers [6][7][8][9][10]. These systems are often fabricated on a substrate through the use of soft lithography on polymeric materials because they are flexible and allow the form and features of these devices to be created and remain functionally sound.…”
Section: Introductionmentioning
confidence: 99%
“…So far, however, very few reports have been found to deepen the knowledge and understanding of this subject. Although discussions about the matching problem between driving frequency and driving voltage have been made by Stemme [1], Gerlach [19] and later comers, there is still a lot of work left for people to explore on the valveless piezoelectric pump with cone-shaped tubes in the view of energy matching, energy flow and energy balance, which may also become a new research direction, even a hotspot, in the near future.…”
Section: Brief Summarymentioning
confidence: 99%
“…In 1995, Gerlach, et al [19], developed a valveless piezoelectric micro-pump with tapered flow tubes by using MEMS technology on a silicon plate. The micro-tapered flow tube using MEMS technology on a silicon substrate is shown in Fig.…”
Section: Introductionmentioning
confidence: 99%
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“…The opening angles of these nozzle/diffuser elements were small, normally less than 20 o and the diffuser direction was the positive flow direction. A different type of nozzle/diffuser elements fabricated in silicon using anisotropic wet etching was presented in 1995 [24,25]. As shown in Fig.…”
Section: Figure 21 Reciprocating Displacement Micropumps With Differementioning
confidence: 99%