WR-1.5 band waveguide bandpass dual-mode filter on silicon micromachining technique

Zheng, Zhongwan; Hu, Jian; Liu, Shuang; Zhang, Yong

doi:10.1109/iccps.2015.7454103

Cited by 3 publications

(1 citation statement)

References 8 publications

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“…On the other hand, there is also much literature based on advanced high-precision semiconductor technologies, such as deep reactive ion etching (DRIE) [9,10], silicon via (TSV) [11,12], and microelectromechanical systems (MEMS) [13][14][15][16][17], to achieve the manufacturing of terahertz filters. Ideally, with the improvement of fabrication accuracy, performance errors can be reduced to a lower level, but due to the maturity of advanced semiconductor technology and material limitations, the current performance of terahertz devices is not excellent.…”

Section: Introductionmentioning

confidence: 99%

Design of High-Precision Terahertz Filter Based on Directional Optimization Correction Method

Zhang

Liu

et al. 2023

Electronics

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The directional optimization correction (DOC) method is proposed to reduce the performance error between desired and fabricated terahertz (THz) devices. Three 340 GHz terahertz filters with a bandwidth of 20 GHz are designed and fabricated. The traditional global optimization correction (GOC) method and the proposed DOC method are used to optimize and reduce the performance error, respectively. It is garnered that the center frequency error and bandwidth error of the fabricated terahertz filter optimized by the GOC method are reduced to 3.5 GHz (~1.03%) and 2.2 GHz (~11%), respectively. Meanwhile, the center frequency error and bandwidth error of the fabricated terahertz filter optimized by the DOC method are reduced to 0.2 GHz (~0.06%) and 0.4 GHz (~2.0%), respectively, which has fewer optimization parameters and higher accuracy than the GOC method. Furthermore, the in-band return loss (RL) of two optimized terahertz filters based on the DOC and GOC methods is less than 15 dB, and the in-band insertion loss (IL) is less than 2.3 dB.

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Section: Introductionmentioning

confidence: 99%

Design of High-Precision Terahertz Filter Based on Directional Optimization Correction Method

Zhang

Liu

et al. 2023

Electronics

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Packages for Terahertz Electronics

Song

2017

Proc. IEEE

112

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| In the last couple of decades, solid-state device technologies, particularly electronic semiconductor devices, have been greatly advanced and investigated for possible adoption in various terahertz (THz) applications, such as imaging, security, and wireless communications. In tandem with these investigations, researchers have been exploring ways to package those THz electronic devices and integrated circuits for practical use. Packages are fundamentally expected to provide a physical housing for devices and integrated circuits (ICs) and reliable signal interconnections from the inside to the outside or vice versa. However, as frequency increases, we face several challenges associated with signal loss, dimensions, and fabrication. This paper provides a broad overview of recent progress in interconnections and packaging technologies dealing with these issues for THz electronics. In particular, emerging concepts based on commercial ceramic technologies, micromachining, and 3-D printing technologies for compact and lightweight packaging in practical applications are highlighted, along with metallic split blocks with rectangular waveguides, which are still considered the most valid and reliable approach.

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Exploring the Tuning Range of Channel Filters for Satellite Applications Using Electromagnetic-Based Computer Aided Design Tools

Ossorio

Vague

Boria

et al. 2018

IEEE Trans. Microwave Theory Techn.

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The objective of this paper is to use Electromagnetic based Computer-Aided Design tools to investigate the maximum tuning range of channel filters, typically used in satellite payloads. Both circular and rectangular waveguide technologies are investigated. The results of the investigation show that single-mode rectangular waveguide implementations offer substantially wider tuning range, as opposed to classical dual-mode circular waveguide implementations. In addition to simulations, measurements are also presented indicating very good agreement with theory, thereby fully validating the Computer-Aided Design procedure.

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WR-1.5 band waveguide bandpass dual-mode filter on silicon micromachining technique

Cited by 3 publications

References 8 publications

Design of High-Precision Terahertz Filter Based on Directional Optimization Correction Method

Design of High-Precision Terahertz Filter Based on Directional Optimization Correction Method

Packages for Terahertz Electronics

Exploring the Tuning Range of Channel Filters for Satellite Applications Using Electromagnetic-Based Computer Aided Design Tools

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