Wrinkle Analysis of Space Membrane Structures and Applications

Wang, C. G.; Du, Xi

doi:10.1080/15502280701252594

Cited by 8 publications

(5 citation statements)

References 10 publications

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“…Several studies performed FEM analysis using the ANSYS workbench to evaluate the wrinkles in the membrane. [19][20][21][22] We also used ANSYS 2021R1 to simulate the wrinkle profile in a fullsized (110 mm × 143 mm) pellicle under EUV exposure. The simulation was performed using steady-state thermomechanically coupled analysis.…”

Section: Fem Simulation Of a Wrinkle In The Slit Area Of The Euv Pelliclementioning

confidence: 99%

Impact of thermal expansion coefficient on the local tilt angle of extreme ultraviolet pellicle

Kim

Ahn

2022

J. Micro/Nanopattern. Mats. Metro.

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Background: A local tilt angle of <300 mrad results in a critical dimension uniformity (CDU) impact below 0.1 nm when a pellicle is used for extreme ultraviolet (EUV) lithography. However, the thermomechanical property guidelines satisfying this specification have not yet been established. Aim:We present the thermomechanical property guidelines that yield a CDU impact below 0.1 nm.Approach: The peak temperature ranges of the EUV pellicle, as a function of the emissivity, were calculated through experimental, numerical, and finite element method analyses. The wrinkle profiles were evaluated as a function of the coefficient of thermal expansion (CTE) within these temperature ranges. The emissivity and CTE values satisfying the specifications were obtained using the CDU impact caused by the wrinkled EUV pellicle. Results:The wrinkle amplitude in the EUV pellicle exhibited 45% attenuation with a twofold decrease in the CTE. The maximum local tilt angles for the 17, 16, and 15 nm half-pitch patterns were 290.2, 286.1, and 272.3 mrad, respectively. CTE below 2 × 10 −5 K −1 and emissivity above 0.1 are suggested for the EUV pellicle. Conclusions:The CTE and emissivity guidelines satisfying the CDU impact specifications can be used for developing next-generation EUV pellicles.

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Section: Fem Simulation Of a Wrinkle In The Slit Area Of The Euv Pelliclementioning

confidence: 99%

Impact of thermal expansion coefficient on the local tilt angle of extreme ultraviolet pellicle

Kim

Ahn

2022

J. Micro/Nanopattern. Mats. Metro.

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“…The wrinkles are the local buckling deformed problems which need the complicated and specialized computations to obtain the accurate wrinkling characteristics. The local wrinkling behaviors of inflatable structures can be analyzed by using specialized nonlinear shell model [18][19][20][21]. In fact, in our method we have considered the possible wrinkles.…”

Section: Fig 3 Inflatable Beam Under Bendingmentioning

confidence: 99%

Pseudo-beam method for compressive buckling characteristics analysis of space inflatable load-carrying structures

Wang

Tan

2009

Acta Mech Sin

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This paper extends Le van's work to the case of nonlinear problem and the complicated configuration. The wrinkling stress distribution and the pressure effects are also included in our analysis. Pseudo-beam method is presented based on the inflatable beam theory to model the inflatable structures as a set of inflatable beam elements with a prestressed state. In this method, the discretized nonlinear equations are given based upon the virtual work principle with a 3-node Timoshenko's beam model. Finite element simulation is performed by using a 3-node BEAM189 element incorporating ANSYS nonlinear program. The pressure effect is equivalent included in our method by modifying beam element cross-section parameters related to pressure. A benchmark example, the bending case of an inflatable cantilever beam, is performed to verify the accuracy of our proposed method. The comparisons reveal that the numerical results obtained with our method are close to open published analytical and membrane finite element results. The method is then used to evaluate the whole buckling and the loadcarrying characteristics of an inflatable support frame subjected to a compression force. The wrinkling stress and region characteristics are also shown in the end. This method gives better convergence characteristics, and requires much less computation time. It is very effective to deal with the whole The project supported by the Specialized Fund for the Doctoral

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“…The relation between the principle stress-strain is used for predicting the slackness or the wrinkling state of the membrane structure. 24 Wang et al 25 investigated the two approaches for the wrinkle prediction with buckling analysis and explicit time integration method. The active wrinkle reduction technique is suggested by Wang et al 25 The active wrinkle reduction method needs a dedicated power source and the sensor and actuation unit, which makes the system complex.…”

Section: Introductionmentioning

confidence: 99%

“…24 Wang et al 25 investigated the two approaches for the wrinkle prediction with buckling analysis and explicit time integration method. The active wrinkle reduction technique is suggested by Wang et al 25 The active wrinkle reduction method needs a dedicated power source and the sensor and actuation unit, which makes the system complex. Unnikrishnan et al 26 have used an Element-Free Galerkin Method (a meshless method) for the wrinkling analysis.…”

Section: Introductionmentioning

confidence: 99%

“…Many researchers have worked over the methods for maintaining uniform stresses and wrinkle reduction techniques. 13,25,27,28 But no research is done for increasing the natural frequency of vibration along with wrinkle reduction. The work presents a novel methodology of material combination for margin and Radio-Frequency (RF) area for rectangular planar membrane reflector antenna.…”

Section: Introductionmentioning

confidence: 99%

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Investigation on material combination technique to enhance the anti-wrinkle and anti-vibration characteristics of the planar membrane reflector

Shinde

Kumar

Upadhyay

2021

Proceedings of the Institution of Mechanical Engineers, Part C:

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In recent trends, membrane structure has increased its applications in space missions due to its significant advantages, such as light in weight, higher folding and packaging efficiency, ease of deployment, and low on-Board volume requirement. The wrinkling and low natural frequency of vibration are the major problems with the membrane structure. This research presents a novel methodology of Kapton-Kevlar material combination for a planar membrane reflector to enhance anti-vibration and anti-wrinkling capabilities of the membrane structure. The comparative study is made for the wrinkle area, RMS error, and natural frequency of vibration with the employed approach. This study provides new insights into a material combination technique to increase performance characteristics of the space-borne membrane reflectors. The outcome of the wrinkling analysis is compared and found to be consistent with the method available in the literature. From the simulation results, it is observed that wrinkles are reduced, and the natural frequency of vibration is also increased significantly with the proposed method.

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Wrinkle Analysis of Space Membrane Structures and Applications

Cited by 8 publications

References 10 publications

Impact of thermal expansion coefficient on the local tilt angle of extreme ultraviolet pellicle

Impact of thermal expansion coefficient on the local tilt angle of extreme ultraviolet pellicle

Pseudo-beam method for compressive buckling characteristics analysis of space inflatable load-carrying structures

Investigation on material combination technique to enhance the anti-wrinkle and anti-vibration characteristics of the planar membrane reflector

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