2007
DOI: 10.1524/zkri.2007.222.11.650
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X-ray computed tomography in Zernike phase contrast mode at 8 keV with 50-nm resolution using Cu rotating anode X-ray source

Abstract: High-resolution X-ray computed tomography (XCT) enables nondestructive 3D imaging of complex structures, regardless of their state of crystallinity. This work describes a sub-50 nm resolution XCT system operating at 8 keV in absorption and Zernike phase contrast modes based on a commercially available Cu rotating anode laboratory X-ray source. The system utilizes a high efficiency reflective capillary condenser lens and high-resolution Fresnel zone plates with an outermost zone width of 35 nm and 700 nm struct… Show more

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Cited by 166 publications
(91 citation statements)
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“…A nano-CT (UltraXRM L200, Xradia, Inc., Pleasanton, CA) was used to image the three-dimensional electrode structure with an 8 keV X-ray beam focused by a capillary condenser and Fresnel zone plate objective [24]. For imaging in the nano-CT, the electrode/Kapton film was cut to have a triangular point that would fit into the field of view and then inserted into a clip-type sample holder.…”
Section: Electrode Preparation and Nano-ctmentioning
confidence: 99%
“…A nano-CT (UltraXRM L200, Xradia, Inc., Pleasanton, CA) was used to image the three-dimensional electrode structure with an 8 keV X-ray beam focused by a capillary condenser and Fresnel zone plate objective [24]. For imaging in the nano-CT, the electrode/Kapton film was cut to have a triangular point that would fit into the field of view and then inserted into a clip-type sample holder.…”
Section: Electrode Preparation and Nano-ctmentioning
confidence: 99%
“…By using focused ion beam -scanning electron microscopy (FIB-SEM) or Xray microscopy techniques, a significant progress has been made for the 3D microstructure reconstruction of conventional composite electrodes. 14,15 However, these methods are presently unable to reconstruct the infiltrated microstructures as the relative low resolutions (e.g. 10-50 nm) of these techniques are insufficient to provide microstructural information of the infiltrated nanoparticles (can be about 25 nm in radius).…”
mentioning
confidence: 99%
“…Real-time optical inspection was used for this procedure, during which no large-scale defects were observed, thus it was concluded that the separation process did not affect the microstructure of the intended region of interest. A ZEISS Xradia 810 Ultra was then used to provide 3D images with 130 nm voxel resolution on the specimens, using a 5.4 keV quasi-monochromatic imaging system operating in absorption contrast mode [52]. Finally, the specimens were passed into the ZEISS Auriga FIB-SEM system outfitted with an Oxford Instruments X-MaxN 150 EDS spectrometer.…”
Section: Correlative Microscopy: Nano-xrm To Sem-edsmentioning
confidence: 99%