X-ray diffraction from corrugated crystalline surfaces and interfaces

Abstract

Satellite peaks analogous to superlattice peaks have been observed for both corrugated InP substrates and for such substrates overgrown with epitaxial InGaAsP. These satellites are entirely due to the corrugations. High-resolution x-ray diffraction using extremely asymmetric reflections in the glancing exit configuration was used. A kinematical expression for the intensities of the satellite peaks is derived for strain-free structures.

Lateral periodicity and elastic stress relaxation in GaInAsP quantum wires on InP investigated by x-ray diffractometry

“…However, these investigations were still concerned with lateral periodicities, which are much larger than the dimensions of the quantization. [6][7][8][9][10] Therefore, it was possible to apply triple crystal techniques for reciprocal space mapping 11,12 even with a sealed x-ray tube in order to obtain a considerable number of grating superstructure maxima. More recent work reached smaller periodicities of the wire gratings by utilizing high-intensity synchrotron sources.…”

High-resolution X-ray diffraction of silicon-on-nothing

“…A few methodologies adopted to analyse the experimental data reported here were previously employed to investigate periodically corrugated surfaces and interfaces, quantum wires and quantum dots (see e.g. Tapfer & Grambow, 1990;Macrander & Slusky, 1990;van der Sluis et al, 1993;Shen et al, 1993;Holý et al, 1993;Gailhanou et al, 1993;Darhuber et al, 1995). However, the results obtained in this work refer to an innovative process of the silicon technology recently designed to manufacture transistor architectures, fully adequate for the future nodes of the ITRS.…”

Subnanometer wavelength metrology of lithographically prepraed structures: a comparison of neutron and X-ray scattering.

“…9,10 One technique that potentially avoids the need for large samples is based on crystal truncation rod (CTR) scattering, where information on the pattern is obtained by scanning the region around a Bragg diffraction of the underlying substrate. [11][12][13][14] Using this technique, more than 20 orders of diffraction have been reported for line patterns etched in a variety of inorganic substrates. 12 The primary disadvantage of these techniques is their dependence on a highly ordered substrate to produce the Bragg reflection.…”

“…Recognizing the advantages of a sub-nanometer wavelength and a large depth of penetration, a wide range of x-ray based techniques are used to measure patterns in research applications. [7][8][9][10][11][12][13][14] Since many of these techniques operate in reflection, they often suffer from the requirement of large sample sizes and long data collection times. 8 In addition, the lack of a general analytical description of reflection scattering by x-rays often results in extensive modeling during data analysis.…”