X-ray investigation of strained epitaxial layer systems by reflections in skew geometry

Abstract

Four different SiGe/Si layer structures, pseudomorphically grown and (partially) relaxed, are used as examples to demonstrate that reflections in symmetric skew geometry can successfully be used to realize a complex analysis of these systems. Taking the intensity exactly along the truncation rod of a reciprocal lattice point, it is possible to simulate this diffraction curve and determine the layer parameter in the projection according to the netplane tilt relative to the surface. The main precondition for this technique and for performing reciprocal space mapping with sufficiently high resolution is a low angular divergence of the incident and detected beams perpendicular to the diffraction plane, which can also be achieved by suitable optical elements on laboratory‐based diffractometers.