X-ray lithography using a KrF laser–plasma source

O'Neill, F.; Gower, Malcolm C.; Turcu, I. C. Edmond; Owadano, Y.

doi:10.1364/ao.25.000464

Cited by 24 publications

(8 citation statements)

References 6 publications

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“…The patterning was applied using a 248 nm KrF excimer laser source (KrF Scanner System, ASML Co., Netherlands). 13 To form nanopillars on the polymer film surface, dry etching (LAM Research, Canada) was performed. Parabolic nanostructures were manufactured on the PMMA surface by depositing silicon dioxide (SiO 2 ) via a thermal oxidation process.…”

Section: ■ Materials and Methodsmentioning

confidence: 99%

“…Each unit cell of the simulated geometrical structure had dimensions of 1 μm × 1 μm, and the cells formed a hexagonal, close-packed array. The patterning was applied using a 248 nm KrF excimer laser source (KrF Scanner System, ASML Co., Netherlands) . To form nanopillars on the polymer film surface, dry etching (LAM Research, Canada) was performed.…”

Section: Methodsmentioning

confidence: 99%

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Nanostructured Multifunctional Surface with Antireflective and Antimicrobial Characteristics

Kim

Jung²,

Kim³

et al. 2015

ACS Appl. Mater. Interfaces

135

108

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Functional polymeric films with antireflective and hydrophobic properties have been widely used for electronic device displays. However, the design of such functional films with an antimicrobial characteristic has been a challenge. We designed a nanostructured surface using a rigorous coupled-wave analysis to obtain a period of 300 nm and an aspect ratio of 3.0 on a flat poly(methyl methacrylate) film. The fabricated nanostructure was hydrophobic and exhibited the desired optical characteristics with a reflectance of less than 0.5% over the visible wavelength range. Furthermore, the nanoimprinted polymer film exhibited antimicrobial characteristics and low adhesion when compared with the corresponding flat surface. The results suggest that the nanostructured surface designed in this study is multifunctional and should be suitable for the production of protective optical and hygienic polymer films for the displays of portable electronic devices.

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Section: ■ Materials and Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Nanostructured Multifunctional Surface with Antireflective and Antimicrobial Characteristics

Kim

Jung²,

Kim³

et al. 2015

ACS Appl. Mater. Interfaces

135

108

View full text Add to dashboard Cite

show abstract

“…SPRITE of RAL, is a KrF excimer laser producing more than 200 J of ultraviolet radiation at a wavelength of 249 nm in a 50 ns pulse. VULCAN is an Nd:glass laser at RAL too, producing more than 150 J per beam at a wavelength of 1.05 µm or about 50 -70 J frequency doubled radiation at 0.53 µm in 1 ns pulse [11]. The development of plasmas producing soft X-rays, using pulsed KrF (0.6 J) and Nd:YAG (0.5 J) lasers has also been investigated since very long [11].…”

Section: Introductionmentioning

confidence: 99%

Laser Produced Plasma X-Ray Sources for Nanoscale Resolution Contact Microscopy: A Candidate in Cancerous Stem Cells Imaging

Al-Hadeethi¹,

Al-Mujtabi²,

Al-Marzouki³

2017

AMI

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Plasma X-ray sources for biological microscopy have been produced by focusing single shots from Nd:glass laser onto carbon rod targets at irradiances between 1 × 10 13 W•cm −2 and 3 × 10 13 W•cm −2 to expose test objects. The optimum parameters needed for obtaining high accurate information on the samples under test namely: the minimum energies and irradiances at a range of angles between the incoming laser beam and the normal to the resist, the depth of exposure of the photoresist as a function of incident laser energy (and irradiance) were concluded in this work.

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“…Laser-produced plasmas are very powerful laboratory scale soft X-ray sources, already successfully applied to radiobiology [1], X-ray microscopy [2,3], micro-lithography [4], and EXAFS [5]. PACS 52.70.La -X-ray and ~,-ray measurements.…”

mentioning

confidence: 99%

“…The large pulse energy of the laser system developed at Frascati makes it competitive to more complex and big lasers already used in such applications [4]. The large pulse energy of the laser system developed at Frascati makes it competitive to more complex and big lasers already used in such applications [4].…”

mentioning

confidence: 99%