X-ray Microscopy and Microtomography

Chapman, Henry N.; Kirz, Janos; Stampanoni, Marco

doi:10.1080/08940886.2013.771061

Cited by 1 publication

(1 citation statement)

References 5 publications

(6 reference statements)

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“…This limits the utility of traditional X-ray scattering techniques in the study of systems whose properties are inherently linked to structural heterogeneity. To address the need for local structural information at the nano and mesoscopic scales, the capabilities of X-ray imaging have grown tremendously over the past two decades (Chapman et al, 2013;Miao et al, 1999;Robinson et al, 2001;Thibault et al, 2008;Fenter et al, 2006a). This progress has been made possible by the emergence of X-ray sources with improved spatial coherence (Reich, 2013) and the substantial advances in X-ray optics (Ice et al, 2011;Mimura et al, 2010;Yan et al, 2013).…”

Section: Introductionmentioning

confidence: 99%

Full-field X-ray reflection microscopy of epitaxial thin-films

Laanait

Zhang

Schlepütz

et al. 2014

J Synchrotron Radiat

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Novel X-ray imaging of structural domains in a ferroelectric epitaxial thin film using diffraction contrast is presented. The full-field hard X-ray microscope uses the surface scattering signal, in a reflectivity or diffraction experiment, to spatially resolve the local structure with 70 nm lateral spatial resolution and sub-nanometer height sensitivity. Sub-second X-ray exposures can be used to acquire a 14 µm × 14 µm image with an effective pixel size of 20 nm on the sample. The optical configuration and various engineering considerations that are necessary to achieve optimal imaging resolution and contrast in this type of microscopy are discussed.

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