1988
DOI: 10.1103/physrevlett.60.600
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X-ray scattering studies of the Si-SiO2interface

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Cited by 105 publications
(23 citation statements)
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“…Quartz is the material for timing in electronic circuits. Other crystalline silica, such as cristobalite, can be found in Si and SiO 2 interfaces in microchips [95,96]. Since the discovery of carbon nano-tubes, different types of nano-tubes and nano-wires have been studied both in theory and experiment.…”
Section: Interface Between Finite Element and MDmentioning
confidence: 99%
“…Quartz is the material for timing in electronic circuits. Other crystalline silica, such as cristobalite, can be found in Si and SiO 2 interfaces in microchips [95,96]. Since the discovery of carbon nano-tubes, different types of nano-tubes and nano-wires have been studied both in theory and experiment.…”
Section: Interface Between Finite Element and MDmentioning
confidence: 99%
“…32 might exist in the SiO 2 layer. While in thermal SiO 2 on cubic Si(001) substrates tetragonal α-cristobalite crystallites are found, 33 under normal conditions (atmosphere pressure, room temperature) the only stable modification of SiO 2 is α-quartz. Temperature and pressure during the oxidation would cause a formation of β-quartz (hexagonal), which usually converts to α-quartz (rhombohedral) when it cools down.…”
Section: Results and Discussion (Type A)mentioning
confidence: 99%
“…GIXS analysis of the Si -SiO 2 interface was reported by Fuoss et al . [42] , and several other examples of GIXS applications have been described by Segm ü ller [43] . GIXS diffraction studies of LangmuirBlodgett fi lms [29] , and also of oriented polycrystalline Cr 2 O 3 layers [44] , have been reported (the latter study employed a sealed laboratory X -ray tube).…”
Section: Grazing Incidence X -Ray Scattering ( Gixs )mentioning
confidence: 97%