X-ray topo-tomography studies of linear dislocations in silicon single crystals

Асадчиков, В. Е.; Buzmakov, A. V.; Chukhovskii, F. N.; Dyachkova, I. G.; Золотов, Д. А.; Danilewsky, A.N.; Baumbach, Tilo; Bode, Simon; Haaga, S.; Hänschke, Daniel; Kabukcuoglu, Merve; Balzer, M.; Caselle, M.; Суворов, Е. В.

doi:10.1107/s160057671801419x

“…When using a crystal in Laue geometry, it is necessary to take into account the spectrum of the incident radiation and the thickness of the crystal to minimize the influence of absorption. From previous experience (Zolotov et al, 2017;Asadchikov et al, 2018), the attenuation value t should be less than 1 (where is the linear absorption coefficient and t is the crystal thickness). To satisfy this condition, it was decided to use an X-ray tube with a molybdenum anode with the thickness of the silicon monochromator crystal not exceeding 700 mm.…”

Section: Resultsmentioning

confidence: 99%

Dual-energy crystal-analyzer scheme for spectral tomography

Золотов

¹

,

Buzmakov

²

,

Grigoriev

³

et al. 2020

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In the present work, a method for adjusting a crystal analyzer to separate two characteristic lines from the spectrum of a conventional X-ray tube for simultaneous registration of tomographic projections is proposed. The experimental implementation of this method using radiation of a molybdenum anode (K 1 , K lines) and a silicon Si(111) crystal analyzer in Laue geometry is presented. Projection images at different wavelengths are separated in space and can be recorded independently for further processing. Potential uses of this scheme are briefly discussed. research papers J. Appl. Cryst. (2020). 53, 781-788 Denis Zolotov et al. Dual-energy crystal-analyzer scheme for spectral tomography 785

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“…Although this other method, based on different principles, differs from the section methods and therefore is not discussed in this review, we add to the list of references several important studies performed by quasi-plane topography [91][92][93][94]. We also add to the list a link to a new effective method for studying defects in crystals, called topo−tomography [95].…”

Section: Discussionmentioning

confidence: 99%

Section methods of X-Ray diffraction topography

Shul’pina

¹

,

Суворов

²

,

Смирнова

³

et al. 2022

Technical Physics

3

0

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X-ray topography is a group of methods for obtaining diffraction images of structural defects in crystals. Among them, section topography techniques are distinguished by their abilities in acquiring quantitative information about defects based on the analysis of the images. For this purpose, special applications of the dynamic theory of X-ray diffraction are being developed. The interference of wave fields excited in a crystal by an X-ray beam is the basis of the section methods. Their sensitivity to weak lattice distortions is much higher than that of other X-ray methods. This review describes the physical foundations and implementation of the section topography techniques, as well as the results of computer simulating the wave field in a crystal. We present some examples of solving materials science and microelectronics problems and briefly describe the section topography using synchrotron radiation. Keywords: X-ray topography, single crystals, defects in crystals, silicon, diamond, indium antimonide.

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“…Хотя этот другой метод, основанный на иных принципах, отличается от секционных методов и поэтому не обсуждается в данном обзоре, мы добавляем в список литературы несколько важных работ, выполненных квази-плосковолновой топографией [91][92][93][94]. Вносим в список и ссылку на новый эффективный метод исследования дефектов в кристаллах, получивший название топо−томографии [95].…”

Section: заключениеunclassified

Cекционные Методы Рентгеновской Дифракционной Топографии (Обзор)

Шульпина¹,

Суворов²,

Смирнова³

et al. 2022

Журнал Технической Физики

3

0

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X-ray topography is a group of methods for obtaining diffraction images of structural defects in crystals. Among them, section topography techniques are distinguished by their abilities in acquiring quantitative information about defects based on the analysis of the images. For this purpose, special applications of the dynamic theory of X-ray diffraction are being developed. The interference of wave fields excited in a crystal by an X-ray beam is the basis of the section methods. Their sensitivity to weak lattice distortions is much higher than that of other X-ray methods. This review describes the physical foundations and implementation of the section topography techniques, as well as the results of computer simulating the wave field in a crystal. We present some examples of solving materials science and microelectronics problems and briefly describe the section topography using synchrotron radiation.

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X-ray topo-tomography studies of linear dislocations in silicon single crystals

Cited by 24 publications

References 17 publications

Dual-energy crystal-analyzer scheme for spectral tomography

Dual-energy crystal-analyzer scheme for spectral tomography

Section methods of X-Ray diffraction topography

Cекционные Методы Рентгеновской Дифракционной Топографии (Обзор)

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