2013
DOI: 10.1007/s00339-013-7564-z
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X-ray topography study of monocrystalline silicon wafers diffused with phosphorus by different methods

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Cited by 4 publications
(2 citation statements)
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“…In that context especially oxidation-induced stacking faults have to be considered, which are known to grow from interfaces between Si and SiO x during oxidation or annealing [16]. That brings particularly the POCl 3 -diffusion step of the solar cell process into the focus of the discussion [17]. But in contrast to the intrinsic stacking faults, which are assumed in this work, stacking faults being induced by oxidation are commonly assigned to the extrinsic fault-type [18].…”
Section: Structural Properties and Formation Of Stacking Faultsmentioning
confidence: 98%
“…In that context especially oxidation-induced stacking faults have to be considered, which are known to grow from interfaces between Si and SiO x during oxidation or annealing [16]. That brings particularly the POCl 3 -diffusion step of the solar cell process into the focus of the discussion [17]. But in contrast to the intrinsic stacking faults, which are assumed in this work, stacking faults being induced by oxidation are commonly assigned to the extrinsic fault-type [18].…”
Section: Structural Properties and Formation Of Stacking Faultsmentioning
confidence: 98%
“…Severe wafer lifetime degradation has been reported for p-type wafers processed with dopant pastes [124]. X-ray topography studies have also shown that screen-printed dopant pastes create more micro-defects in Si wafers than POCl 3 or phosphoric acid diffusion [125]. Auto-doping and lifetime issues will need to be addressed before such a doping approach can gain any traction in the industry.…”
Section: Dopant Pastementioning
confidence: 99%