XPS investigation of BxNyCz coatings deposited by laser assisted chemical vapour desposition

Oliveira, Maria Liz Cunha de; Rego, A.M. Botelho do; Conde, O.

doi:10.1016/s0257-8972(97)00656-7

Cited by 29 publications

(16 citation statements)

References 7 publications

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“…(a) 187, No. 1, 1-12 (2001) # WILEY-VCH Verlag Berlin GmbH, 13086 Berlin, 2001 0031-8965/01/18709-0001 $ 17.50þ.50/0 to produce B-C-N films were made using CVD techniques [11,12]. In these cases, only hexagonal boron nitride forms (h-BN) were obtained.…”

Section: Introductionmentioning

confidence: 99%

Boron Carbide and Boron-Carbon Nitride Films Deposited by DC-Magnetron Sputtering: Structural Characterization and Nanotribological Properties

Freire

Reigada

Prioli

2001

phys. stat. sol. (a)

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The effects of nitrogen incorporation into amorphous boron carbide (B 4 C) films were studied. The films were deposited by dc-magnetron sputtering with the Si substrates at room temperature. The nitrogen incorporation occurs at the expense of the boron content. The main feature of infrared absorption spectra obtained from B 4 C films is a broad band at around 1100 cm --1 that shifts to higher wavenumbers upon nitrogen incorporation. The spectra obtained from films with higher nitrogen content are typical of hexagonal boron nitride. The friction coefficient and the surface wear were studied by lateral force microscopy. The influence of several parameters like relative humidity, scanning velocity and load force was investigated. For boron-carbon nitride films, a weak dependence on the relative humidity of wear and friction coefficients was observed. In the case of B 4 C films, there is a clear correlation between the wear depth and the energy deposited at the AFM tip-film interface.

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Section: Introductionmentioning

confidence: 99%

Boron Carbide and Boron-Carbon Nitride Films Deposited by DC-Magnetron Sputtering: Structural Characterization and Nanotribological Properties

Freire

Reigada

Prioli

2001

phys. stat. sol. (a)

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“…2(a), the deconvolution of B 1s spectra for the films grown at p N2 = 2.5, 3.5 and 5.0 Pa presents three peaks located at 188.1, 189.5, and 191.0 eV, respectively. The component peak centered at 191.0 eV can be attributed to the B-N bond with a h-BN-like configuration, based on the literatures [4,11,16]. The peak located at 189.5 eV is attributed to the B-C bond because the binding energy of BC 3 has been found to be 189.5 eV [12,17].…”

Section: Bonding Structurementioning

confidence: 85%

“…BCN films have been synthesized by many physical or chemical deposition techniques, including ion beam assisted deposition [4][5][6], radio frequency magnetron sputtering [2,7], pulsed laser deposition [8][9][10], and plasma-assisted chemical vapor deposition [11,12]. However, most of those studies only investigated the regulating of film composition or/and the estimating of bonding structure in order to confirm whether the prepared films were the products of atomic hybridization or just a macroscopic mixture of phase separation.…”

Section: Introductionmentioning

confidence: 99%

Influence of nitrogen pressure on bonding structure and mechanical properties of pulsed laser deposited BCN thin films

Jun

Wang

Shen

et al. 2015

Surface and Coatings Technology

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“…The aim of the intensive investigations performed on the B--C--N system in the last years has been the combination of the outstanding mechanical, tribological, chemical, and thermal properties of cubic and hexagonal boron nitride, diamond, graphite and diamond-like carbon [1,2,3,4,5,6,7,8,9,10,11,12]. The BCN thin films are expected to possess high hardness, low internal stress, good adhesion, superior tribological properties, and high resistance to oxidation at high temperatures in contrast to c-BN (high internal stress, poor adhesion), h-BN (low hardness), diamond (low oxidation resistance) and graphite (low hardness and oxidation resistance) [13,14].…”

Section: Introductionmentioning

confidence: 99%

Influence of the composition of BCN films deposited by reactive magnetron sputtering on their properties

Martínez

Kyrsta

Cremer

et al. 2002

Analytical and Bioanalytical Chemistry

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Compounds of the B--C--N system are very promising to produce superhard coatings with good tribological, chemical, and thermal properties. To investigate the influence of the composition of BCN films on their properties, films with five different compositions at nearly constant nitrogen content were deposited on silicon wafers by magnetron sputtering from hexagonal boron nitride and graphite targets operated in RF and DC mode, respectively. The compositions and binding states of the films were determined by XPS. The nitrogen content was found to be almost constant for all films at about a 40 at-%, whereas boron and carbon compositions ranged between 15-35 and 25-50 at-%, respectively. The electronic and bonding structure of the coatings were analyzed by REELS using three different electron beam energies to obtain information at different depths. An increase of the carbon content of the films resulted in a significant shift of the pi-pi* interband transition with respect to the energy loss corresponding to h-BN. The absence of the pi-pi* transition in the energy loss spectra acquired at a beam energy of 1900 eV indicates the existence of a very thin overlayer mostly sp(2) bonded and probably with a distorted hexagonal structure. The position of the bulk plasmon losses corresponded to the hexagonal phase for the overlayer and presented a shift of more than 1.5 eV to the higher energy loss direction for the spectra obtained at 1900 eV beam energy. This shift and the absence of the sp(2)-bond fingerprint induced the possibility of an underlying disordered structure with a majority of sp(3) bonds.

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XPS investigation of BxNyCz coatings deposited by laser assisted chemical vapour desposition

Cited by 29 publications

References 7 publications

Boron Carbide and Boron-Carbon Nitride Films Deposited by DC-Magnetron Sputtering: Structural Characterization and Nanotribological Properties

Boron Carbide and Boron-Carbon Nitride Films Deposited by DC-Magnetron Sputtering: Structural Characterization and Nanotribological Properties

Influence of nitrogen pressure on bonding structure and mechanical properties of pulsed laser deposited BCN thin films

Influence of the composition of BCN films deposited by reactive magnetron sputtering on their properties

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