Nanocrystalline diamond has extensive application in biology modified material aspects of human implants, because it has good mechanical properties such as corrosion resistance and biocompatibility. This study investigated the surface characteristics and biocompatibility of pure titanium whose surface was modified with nanocrystalline diamond by Microwave Plasma Chemical Vapor Deposition. Scanning electron microscope (SEM), Spectruman analysis ray diffraction and X-Ray photoelectron spectroscopy were used to analyze the chemical composition and surface topography of nanocrystalline diamond. We found that the particle size of the diamond on the titanium disc is nanocrystalline, and is without impure elements. In the experiment, we used Human Osteoblast-like cells MG63 to investigate the bioactivity of nanocrystalline diamond film. The attachment and proliferation of the cells were tested by NAPI, CCK-8. The result showed that oxygen terminated NCD groups had a significant advantage compared with hydrogen terminated and titanium groups on attachment and proliferation of MG63.