A novel poly(imide siloxane)/titania (PIS/ TiO 2 ) hybrid film was fabricated by sol-gel process via in situ formation of TiO 2 within PIS matrix. Poly(amic acid siloxane) (PAAS) was prepared from 4,4 0 -oxydiphthalic anhydride, 2,2-bis [4-(4-aminophenoxy) phenyl] propane, and a,x-bis(3-aminopropyl)polydimethylsiloxane (APPS). Chelating agent, acetylacetone, and catalyst-free polymerization were used to reduce the rate of hydrolysis of titanium alkoxide in the PAAS. X-ray photoelectron spectroscopy data showed that the presence of APPS promotes the Ti surface composition of PIS/TiO 2 hybrid film. The effects of TiO 2 and APPS contents on the characteristics of surface, thermostability, coefficient of thermal expansion (CTE), and the strength of adhesion were investigated. The presence of TiO 2 on the surface of the hybrid films enhanced the adhesive strength at the interface of PIS/TiO 2 hybrid film and copper foil. When more TiO 2 was incorporated into the PIS matrix, the PIS/TiO 2 hybrid film exhibited lower CTE while retaining favorable mechanical and thermal properties.