Yttrium β‐Diketonate Glyme MOCVD Precursors: Effects of the Polyether Length on Stabilities, Mass Transport Properties and Coordination Spheres

Malandrino, Graziella; Nigro, Raffaella Lo; Fragalá, Ignazio L.; Benelli, C.

doi:10.1002/ejic.200300354

Cited by 45 publications

(32 citation statements)

References 20 publications

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“…The Y(hfa) 3 ·diglyme was synthesized as described elsewhere [10]. TG measurements were made using a Mettler Toledo TGA/ SDTA 851 e .…”

Section: Methodsmentioning

confidence: 99%

“…[1] In addition, a complete, non-destructive characterization, in order to also assess the direction of growth of YAP films, is mandatory for a simple application of this material. The present paper reports on a novel MOCVD approach for the fabrication of YAP films on (100)SrTiO 3 substrates involving a molten source consisting of the second-generation Y(hfa) 3 ·diglyme [10] (Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione, diglyme = bis(2-methoxyethyl)ether) precursor which acts as a solvent for the Al(acac) 3 (Hacac = acetylacetone). In addition, for the first time, the use of pole figures has been applied to assess the direction of growth of YAlO 3 films and represents a case study for this kind of application of pole figures, which are mainly applied only to characterize in-plane alignment of film grains.…”

Section: Introductionmentioning

confidence: 99%

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Heteroepitaxial YAlO₃ Films on (100)SrTiO₃ Substrates: The Use of Pole Figures as a Non‐invasive Tool to Assess the Direction of Growth

Malandrino¹,

Grigoli²,

Fragalá³

2008

Chemical Vapor Deposition

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YAlO 3 films are grown on (100)SrTiO 3 substrates through an in-situ novel metal-organic (MO)CVD strategy involving a molten source consisting of the second-generation Y(hfa) 3 ·diglyme (Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione, diglyme = bis(2-methoxyethyl)ether) precursor which acts as a solvent for the Al(acac) 3 (Hacac = acetylacetone). The X-ray diffraction (XRD) patterns show that the films are crystalline and highly oriented, while compositional analysis indicates that the films possess the correct 1:1 ratio. Pole figures are applied as a simple, economic, non-invasive tool to assess the growth direction of YAlO 3 films.

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“…The Y(hfa) 3 ·diglyme was synthesized as described elsewhere [10]. TG measurements were made using a Mettler Toledo TGA/ SDTA 851 e .…”

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Heteroepitaxial YAlO₃ Films on (100)SrTiO₃ Substrates: The Use of Pole Figures as a Non‐invasive Tool to Assess the Direction of Growth

Malandrino¹,

Grigoli²,

Fragalá³

2008

Chemical Vapor Deposition

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“…The liquidsource precursors appear the most desirable in MOCVD processes due to the greater stability of the vapor pressure, the absence of any effects of crystallite size on the evaporation rate and, hence, on the film growth rate. Recently, we developed a very simple and low-cost route to produce high-quality, complex oxide films, such as LaAlO 3 or YBa 2 Cu 3 O 7-d , [28,29] adopting molten multimetal sources.…”

Section: Mocvd Growth Of Ccto On Sto Substratesmentioning

confidence: 99%

Control of Heteroepitaxial Growth of CaCu₃Ti₄O₁₂ Films on SrTiO₃ Substrates by MOCVD

Catalano

Malandrino

Toro

et al. 2012

Chemical Vapor Deposition

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Thin films of CaCu 3 Ti 4 O 12 (CCTO) are successfully deposited by metal-organic (MO)CVD on (001)SrTiO 3 substrates. An interesting approach, based on a molten multi-component precursor source, is applied. The molten mixture consists of the Ca(hfa) 2 tetraglyme, Ti(tmhd) 2 (O i Pr) 2 , and Cu(tmhd) 2 [Hhfa ¼ 1,1,1,5,5,5-hexafluoro-2,4-pentanedione; tetraglyme ¼ 2,5,8,11,14-pentaoxapentadecane; Htmhd ¼ 2,2,6,6-tetramethyl-3,5-heptandione; O i Pr ¼ iso-propoxide] precursors. It is also found that, in the present case of a relatively large lattice mismatch ($5%), the epitaxial growth can be achieved by a careful optimization of deposition parameters. Film structural and morphological characterization is carried out using several techniques; X-ray diffraction (XRD), scanning electron microscopy (SEM), and transmission electron microscopy (TEM). A complete comparison between films deposited by two main processes is carried out in order to understand the kinetic and thermodynamic issues involved in the MOCVD epitaxial growth.

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“…The relevance of the approach relies upon the use of a titanium precursor with a low melting point, which dissolves the calcium and copper sources at » 80 C, thus affording a three-component molten source. Similar routes have been applied to the synthesis of high quality LaAlO 3 , [20] TlBaCaCuO, [21] and YBaCuO [22] films. Deposition parameters have therefore been optimized for the molten multimetal precursor mixture on the basis of its thermal properties.…”

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confidence: 93%

A Novel Approach to Synthesizing Calcium Copper Titanate Thin Films with Giant Dielectric Constants

et al. 2004

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ExperimentalMaterials Synthesis: The SBA-15 template was prepared by adding 4.0 g tri-block copolymer poly(ethylene glycol)-block-poly(propylene glycol)-block-poly(ethylene glycol) (EO 20 PO 70 EO 20 ) to a solution of 25 g (35 wt.-%) HCl and 125 g water under stirring. After stirring for 2 h, the copolymer was completely dissolved, after which 8.6 g TEOS was added. Following continuous stirring for 20 h at 35 C, the reaction mixture was transferred to a Teflon-lined autoclave and heated at 100 C for 24 h. The resulting product was obtained by filtration, washed repeatedly with a large amount of water, air-dried at room temperature, and calcined at 500 C for 6 h to remove the surfactant. The calcined SBA-15 was used as template for the preparation of mesoporous carbon CMK-3 by CVD as follows: 0.3 g of calcined SBA-15 was placed in an alumina boat and inserted into a flowthrough tube furnace. Under a flow of nitrogen saturated with styrene vapor at room temperature, the temperature of the furnace was increased, at a ramp rate of 20 C min ±1 , to the final pyrolysis/carbonization temperature (in the range 850±1050 C) and maintained for 3 h under the styrene-saturated nitrogen atmosphere. The furnace was then cooled to room temperature and the resulting SBA-15/carbon mesophase was thoroughly washed with hydrofluoric acid (HF) to etch out the silica. For comparison we also prepared a CMK-3 sample via liquid impregnation (designated CMK-3I) using the method of Jun et al. [4]. Sucrose was used as carbon source and carbonization was performed at 900 C for 7 h [4]. The mesoporous carbon was then recovered by etching the silica in HF. We also prepared CMK-3 samples using other carbon sources, e.g., acetonitrile.Characterization: Powder XRD analysis was performed using a Philips 1830 powder diffractometer with Cu Ka radiation (40 kV, 40 mA). Nitrogen sorption isotherms and textural properties of the materials were determined at ±196 C using nitrogen in a conventional volumetric technique by a Coulter SA3100 sorptometer. Before analysis, the samples were oven dried at 150 C and evacuated for 12 h at 200 C under vacuum. The surface area was calculated using the Brunauer±Emmett±Teller (BET) method based on adsorption data in the partial pressure (P/P 0 ) range 0.05±0.2, and the total pore volume was determined from the amount of the nitrogen adsorbed at P/P 0 » 0.99. The micropore surface area and micropore volume were obtained via t-plot analysis. SEM images were recorded using a JEOL JSM-820 scanning electron microscope. Samples were mounted using a double-sided conductive carbon sticky tape. A thin (ca. 10 nm) coating of gold sputter was deposited onto the samples to reduce the effects of charging. Thermogravimetric analysis of the silica/carbon (i.e., SBA-15/CMK-3) composite materials was performed using a Perkin Elmer Pyris 6 TG analyzer (heating rate of 20 C min ±1 ) in static-air conditions. The field of microelectronics has developed rapidly over the last fifteen years, and its evolution is documented by the contin...

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Yttrium β‐Diketonate Glyme MOCVD Precursors: Effects of the Polyether Length on Stabilities, Mass Transport Properties and Coordination Spheres

Cited by 45 publications

References 20 publications

Heteroepitaxial YAlO₃ Films on (100)SrTiO₃ Substrates: The Use of Pole Figures as a Non‐invasive Tool to Assess the Direction of Growth

Heteroepitaxial YAlO₃ Films on (100)SrTiO₃ Substrates: The Use of Pole Figures as a Non‐invasive Tool to Assess the Direction of Growth

Control of Heteroepitaxial Growth of CaCu₃Ti₄O₁₂ Films on SrTiO₃ Substrates by MOCVD

A Novel Approach to Synthesizing Calcium Copper Titanate Thin Films with Giant Dielectric Constants

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Yttrium β‐Diketonate Glyme MOCVD Precursors: Effects of the Polyether Length on Stabilities, Mass Transport Properties and Coordination Spheres

Cited by 45 publications

References 20 publications

Heteroepitaxial YAlO3 Films on (100)SrTiO3 Substrates: The Use of Pole Figures as a Non‐invasive Tool to Assess the Direction of Growth

Heteroepitaxial YAlO3 Films on (100)SrTiO3 Substrates: The Use of Pole Figures as a Non‐invasive Tool to Assess the Direction of Growth

Control of Heteroepitaxial Growth of CaCu3Ti4O12 Films on SrTiO3 Substrates by MOCVD

A Novel Approach to Synthesizing Calcium Copper Titanate Thin Films with Giant Dielectric Constants

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Heteroepitaxial YAlO₃ Films on (100)SrTiO₃ Substrates: The Use of Pole Figures as a Non‐invasive Tool to Assess the Direction of Growth

Heteroepitaxial YAlO₃ Films on (100)SrTiO₃ Substrates: The Use of Pole Figures as a Non‐invasive Tool to Assess the Direction of Growth

Control of Heteroepitaxial Growth of CaCu₃Ti₄O₁₂ Films on SrTiO₃ Substrates by MOCVD