To account for the occurrence (or not) of the Stranski-Krastanow (SK) transition (two-dimensional to 3D change of surface morphology) during the epitaxial growth of various lattice-mismatched semiconductor systems, we present a simple equilibrium model taking into account not only the lattice mismatch, but also the dislocation formation energy and the surface energy. It demonstrates the importance of these parameters especially for II-VI systems such as CdTe/ZnTe and CdSe/ZnSe. For II-VIs indeed, as misfit dislocations are easier to form than in III-Vs (such as InAs/GaAs) or IV systems (Ge/Si), the 3D elastic transition is short-circuited by the plastic one. Nevertheless, by lowering surface energy, telluride and selenide quantum dots can also be grown as predicted by our model and as evidenced experimentally by reflection high-energy electron diffraction (RHEED), atomic force microscopy and optical measurements.1 Introduction Some combinations of lattice-mismatched semiconductors can exhibit, under specific epitaxial growth conditions, a sharp transition from a layer-by-layer 2D growth to the formation of 3D islands. This Stranski-Krastanow (SK) growth mode [1] allows the relaxation of highly strained 2D layers trough the strain-free facets of 3D islands instead of generating misfit dislocations (MD) [2]. These islands are expected to be dislocation-free and are thus of high structural quality. Usually their typical sizes are on the scale of a few nanometers, so that these self-assembled quantum dots (QDs) are attractive nanostructures for the study of zero dimensional effects.The formation, above a critical film thickness, of such QDs by molecular beam epitaxy (MBE) is now well established for III-V semiconductors such as InAs/GaAs [3]. The large lattice mismatch (∆a/a ≈ 7%) between these two semiconductors is seen as the driving force which induces the 2D-3D change of the surface morphology with the formation of SK islands. However, in the case of II-VI systems, which can exhibit mismatch as large as 6% for CdTe/ZnTe or CdSe/ZnSe, the 2D-3D transition is much less obvious: no clear 3D RHEED pattern has been reported during growth although zero-dimensional behavior was obtained [4][5][6][7]. In II-VIs indeed, above critical thickness, MD form easier than in III-Vs as clearly observed for CdTe/ZnTe by Cibert et al. [8], which corresponds to a plastic relaxation as first considered by Frank and van der Merwe [2]. On the other hand, there are systems such as GaN/AlN [9] or SiGe/Si [10,11], with lower misfit (respectively 2.4% and less than 4%), which are known for exhibiting a clear SK transition with the formation of coherent islands.There are therefore other parameters than the lattice mismatch in order to account for the 2D-3D transition. In this paper a simple equilibrium model taking into account not only the lattice mismatch but also the dislocation formation energy and the surface energy, is presented to explain the occurrence (or not) of this 2D-3D transition for various semiconductor systems.