Zero-Rate Output and Quadrature Compensation in Vibratory MEMS Gyroscopes

Saukoski, M.; Aaltonen, Lasse; Halonen, K.

doi:10.1109/jsen.2007.908921

Cited by 135 publications

(59 citation statements)

References 15 publications

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“…Unfortunately in real-life gyroscopes, there is also a second coupling mechanism which is modelled as in e.g. [14] by the cross-axis spring coefficient k yx . This mechanism is also indicated in the figure and gives rise to an error.…”

Section: B Review Of Dual-frame Vibratory Gyroscopesmentioning

confidence: 99%

A Closed-Loop Digitally Controlled MEMS Gyroscope With Unconstrained Sigma-Delta Force-Feedback

et al. 2009

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In this paper we describe the system architecture and prototype measurements of a MEMS gyroscope system with a resolution of 0.025The architecture makes extensive use of control loops, which are mostly in the digital domain. For the primary mode both the amplitude and the resonance frequency are tracked and controlled. The secondary mode readout is based on unconstrained Σ∆ force-feedback, which does not require a compensation filter in the loop and thus allows more beneficial quantization noise shaping than prior designs of the same order. Due to the force-feedback, the gyroscope has ample dynamic range to correct the quadrature error in the digital domain. The largely digital set-up also gives a lot of flexibility in characterization and testing, where system identification techniques have been used to characterize the sensors. This way, a parasitic direct electrical coupling between actuation and readout of the mass-spring systems was estimated and corrected in the digital domain. Special care is also given to the capacitive readout circuit, which operates in continuous time.

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Section: B Review Of Dual-frame Vibratory Gyroscopesmentioning

confidence: 99%

A Closed-Loop Digitally Controlled MEMS Gyroscope With Unconstrained Sigma-Delta Force-Feedback

et al. 2009

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“…The benefit of dc control is that the amplitude of the excitation and also the resulting crosscoupled components will remain constant despite the temperature-dependent properties of the sensor. A constant ac can be effective in reducing the zero rate offset of the gyroscope [16]. However, for minimum start-up time the gain control can permit a higher maximum excitation force.…”

Section: Discussionmentioning

confidence: 99%

“…By using (16) and (17), and by writing jx m = s, the transfer function from the amplitude of the input force (10), to the amplitude of the resonator displacement (18) can be written back to the s-domain as…”

Section: Discussionmentioning

confidence: 99%

An analog drive loop for a capacitive MEMS gyroscope

Aaltonen¹,

Halonen²

2009

Analog Integr Circ Sig Process

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The linear model and the design of an analog drive loop for the drive (primary) resonator in a capacitive gyroscope are presented. Four different types of gain control topologies are compared and analyzed with both P-and PI-type controllers. The simple model proposed in the paper allows the small signal properties of the loop to be predicted. The theoretical models based on the small signal analysis are compared to the simulated and measured results. A proportional amplitude controller, together with the rest of the drive loop, is implemented using a highvoltage 0.35-lm CMOS technology and a nominal supply of 3 V. Clock generation using a PLL and the drive loop signal as the reference are also discussed in the paper.

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“…The quadrature error requires to be compensated, since it detrimentally affects the measurement. Usual compensation methods consists of either rebalancing the mechanical structure (with mechanical or electrostatic methods - (Painter & Shkel, 2003; Weinberg & Kourepenis, 2006)) or canceling the error from the measurement (using a feed-forward cancellation scheme - (Antonello et al, 2009;Saukoski et al, 2007)). …”

Section: Comb Fingers Actuatorsmentioning

confidence: 99%