Zinc oxide thin films: Characterization and potential applications

O’Brien, Shane; Nolan, M. G.; Çopuroğlu, Mehmet; Hamilton, Jeff; Povey, Ian M.; Pereira, L.; Martins, Rodrigo; Fortunato, Elvira; Pemble, Martyn E.

doi:10.1016/j.tsf.2009.12.020

Cited by 70 publications

(40 citation statements)

References 24 publications

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“…Note that our results are in agreement with the recent study of Herràn et al [25]. To further discuss this point, we consider recent studies made on nanogranular thin films produced by sol-gel spin coating [11] and aerosol techniques [11,12].…”

Section: Electrical Characterizationsupporting

confidence: 91%

“…As an example, measurements of O'Brien et al [11] made on ZnO films produced by sol-gel spin coating technique cannot be interpreted by the scenario discussed above since an increase of the conductivity is observed without humid air. The key factor to understand the different published results seem to be correlated the grain size and porosity of the thin films and so the possible existence of conductive water path due to the capillary condensation of water molecules.…”

Section: Electrical Characterizationmentioning

confidence: 97%

“…Most of the studies focused on the variation of the electrical conduction of the material as function of the relative humidity (RH) and light exposure. Concerning the humidity sensing, to enhance adsorption of water on ZnO surfaces and thereby the sensitivity of the material, nanostructured materials with high porosity area were produced: arrays of nanowires or nanorods by vapor phase transport [8,9] or by arc-discharge method [10], nanogranular thin films by magnetron sputtering [6], sol-gel process [11] or spray pyrolysis [12]. These methods of preparation led to different morphologies (grain size, roughness, porosity .…”

Section: Introductionmentioning

confidence: 99%

“…Note that O'Brien et al [11] have measured the conductivity of films produced by sol-gel spin coating with grains of about 60 nm: they showed an increase of the conductivity in vacuum, i.e. where no water molecules were present in the atmosphere.…”

Section: Introductionmentioning

confidence: 99%

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Interplay effects of humidity and UV light sensitivities of Zn0.9Mg0.1O nanogranular thin films

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Section: Electrical Characterizationsupporting

confidence: 91%

Section: Electrical Characterizationmentioning

confidence: 97%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Interplay effects of humidity and UV light sensitivities of Zn0.9Mg0.1O nanogranular thin films

Brouri

Lescop

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et al. 2015

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“…Of essential attraction is getting such a material which simultaneously plays both the role of a waveguide layer and the sensor layer. Due to its optical and chemical properties zinc oxide ZnO seems to be just such a material [13][14][15][16][17].…”

Section: Introductionmentioning

confidence: 99%

ZnO - Wide Bandgap Semiconductor and Possibilities of Its Application in Optical Waveguide Structures

Struk¹,

Pustelny²,

Gołaszewska³

et al. 2014

Metrology and Measurement Systems

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The paper presents the results of investigations concerning the application of zinc oxide -a wideband gap semiconductor in optical planar waveguide structures. ZnO is a promising semiconducting material thanks to its attractive optical properties. The investigations were focused on the determination of the technology of depositions and the annealing of ZnO layers concerning their optical properties. Special attention was paid to the determination of characteristics of the refractive index of ZnO layers and their coefficients of spectral transmission within the UV-VIS-NIR range. Besides that, also the mode characteristics and the attenuation coefficients of light in the obtained waveguide structures have been investigated. In the case of planar waveguides, in which the ZnO layers have not been annealed after their deposition, the values of the attenuation

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Block Copolymer Approach toward Selective Atomic‐Layer Deposition of ZnO Films

Philip,

Dong,

Vapaavuori

et al. 2023

Adv Eng Mater

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High‐quality thin films of ZnO fabricated with atomic layer precision are attracting increasing interest in various applications beyond the conventional semiconductor industry. This has posed new demands for these thin films regarding for example the substrate compatibility and substrate‐selective deposition. Here we investigate the impact of different underlining polymer substrates on the film growth characteristics of ZnO coatings fabricated with the atomic layer deposition (ALD) technique. The resultant thin films are systematically characterized for the growth rate, crystallinity, surface morphology, hydrophilicity and electrical conductivity. Most excitingly, based on the understanding gained for the ZnO film growth on the different homopolymer surfaces, we designed and fabricated nanoscale‐patterned block copolymer (BCP) films via spin coating to demonstrate block‐selective ALD of ZnO on these BCP surfaces. We will show that the polyethylene oxide (PEO) parts of the BCP act as a significantly more passive surface for the ZnO growth than the polystyrene (PS). Altogether, this concept couples two highly controllable methods – atomic‐level precision of ALD and nanoscale precision of BCP substrates ‐ into a simple and scalable way of producing diverse nanomaterial patterns.This article is protected by copyright. All rights reserved.

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Zinc oxide thin films: Characterization and potential applications

Cited by 70 publications

References 24 publications

Interplay effects of humidity and UV light sensitivities of Zn0.9Mg0.1O nanogranular thin films

Interplay effects of humidity and UV light sensitivities of Zn0.9Mg0.1O nanogranular thin films

ZnO - Wide Bandgap Semiconductor and Possibilities of Its Application in Optical Waveguide Structures

Block Copolymer Approach toward Selective Atomic‐Layer Deposition of ZnO Films

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