Zn-vacancy related defects in ZnO grown by pulsed laser deposition

Ling, C. C.; Luo, Cai Qin; Wang, Z. L.; Anwand, W.; Wagner, A.

doi:10.1117/12.2267186

Cited by 2 publications

(2 citation statements)

References 46 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, the interplanar distance slightly reduces when the annealing temperature further increases to 800 °C, possibly due to the creation of new vacancy defects. Zn out-diffusion at similar annealing temperature (900 °C) has been observed by other group [40][41][42]. Oxygen out-diffusion may be another possible reason for the decrease of interplanar distance as inferred from the XPS results.…”

Section: Resultssupporting

confidence: 79%

“…Another possible reason for the increase of refractive index can be the enhancement in crystallinity as indicated by the XRD and scanning electron microscopy (SEM) results. However, annealing at 800 °C might cause out-diffusion of zinc or oxygen atoms, leading to the decrease of refractive index [ 40 , 41 , 42 ]. The optical band gap ( E g ) was also calculated from the refractive index at 630 nm according to the following model [ 43 ]: n 2 = 1 + [13.6/( E g + 3.4)] 2 …”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Suppression of Oxygen Vacancy Defects in sALD-ZnO Films Annealed in Different Conditions

et al. 2020

View full text Add to dashboard Cite

Zinc oxide (ZnO) has drawn much attention due to its excellent optical and electrical properties. In this study, ZnO film was prepared by a high-deposition-rate spatial atomic layer deposition (ALD) and subjected to a post-annealing process to suppress the intrinsic defects and improve the crystallinity and film properties. The results show that the film thickness increases with annealing temperature owing to the increment of oxide layer caused by the suppression of oxygen vacancy defects as indicated by the X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) spectra. The film transmittance is seldom influenced by annealing. The refractive index increases with annealing temperature at 300–700 °C, possibly due to higher density and crystallinity of the film. The band gap decreases after annealing, which should be ascribed to the decrease in carrier concentration according to Burstein–Moss model. The carrier concentration decreases with increasing annealing temperature at 300–700 °C since the oxygen vacancy defects are suppressed, then it increases at 800 °C possibly due to the out-diffusion of oxygen atoms from the film. Meanwhile, the carrier mobility increases with temperature due to higher crystallinity and larger crystallite size. The film resistivity increases at 300–700 °C then decreases at 800 °C, which should be ascribed primarily to the variation of carrier concentration.

show abstract

Section: Resultssupporting

confidence: 79%