2010
DOI: 10.1002/pssb.201046399
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ZnO nanowire arrays – Pattern generation, growth and applications

Abstract: 761 203 7422, Web: http://www.imtek.de/ nano/ ZnO nanowires and related materials are in the focus of attention for electronic, optical or sensor applications. However, size, position and arrangement control are essential conditions for the development of future nanowire based devices. Various kinds of template methods including nanosphere lithography and UV laser interference lithography are powerful tools for the preparation of the starting metal catalyst arrays and will be demonstrated and discussed. Howeve… Show more

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Cited by 32 publications
(24 citation statements)
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“…This reduces the number of processing steps required to make a device and enables fast prototyping. Despite its inherent 3D fabrication capability, FEBID has been mostly used to make planar structures, such as formation of electrical contacts [67][68][69] or repair of photolithography masks [70]. This restriction arose mostly due to the complexity of the deposition process as it involves many parameters.…”
Section: Electron Beam-induced Processesmentioning
confidence: 99%
“…This reduces the number of processing steps required to make a device and enables fast prototyping. Despite its inherent 3D fabrication capability, FEBID has been mostly used to make planar structures, such as formation of electrical contacts [67][68][69] or repair of photolithography masks [70]. This restriction arose mostly due to the complexity of the deposition process as it involves many parameters.…”
Section: Electron Beam-induced Processesmentioning
confidence: 99%
“…Semiconductor nanowires (NWs) have been studied intensively as potential active materials in optoelectronics and electronics because of their beneficial characteristics in structure, function, and fabrication [1][2][3][4][5][6]. Among these NWs, ZnO is an important wide-gap semiconductor with a band gap of 3.3 eV, which demonstrates strong absorption in ultraviolet (UV) light, thereby leading to evident electronic transitions from valence band to conduction band.…”
Section: Introductionmentioning
confidence: 99%
“…Bottom-up growth methods have attracted, therefore, a great deal of research interest in the past decade. [1][2][3][4] The selfassembled approach leads not only to materials of high quality and purity but also of rather low cost in comparison to standard top-down methods. Particularly, semiconductor nanowires emerged in the recent years 5,6 as promising building blocks for nanoscale optoelectronic devices.…”
Section: Introductionmentioning
confidence: 99%