2012
DOI: 10.1016/j.cap.2012.03.012
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ZnO thin films deposition by spray pyrolysis: Influence of precursor solution properties

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Cited by 154 publications
(63 citation statements)
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“…These properties makes ZnO attractive in places where high hygiene it´s necessary [5]. Therefore, several methods were used to prepare ZnO nanoparticles such as: radio frequency (RF) sputtering process [6], CVD methods [7], pulsed laser deposition [8], spray pyrolisis [9], atomic layer deposition [10], chemical bath deposition [11] or electrodeposition [12]. In sol-gel technique, needs expensive precursors such as alkoxide or organometallic compounds.…”
Section: Imentioning
confidence: 99%
“…These properties makes ZnO attractive in places where high hygiene it´s necessary [5]. Therefore, several methods were used to prepare ZnO nanoparticles such as: radio frequency (RF) sputtering process [6], CVD methods [7], pulsed laser deposition [8], spray pyrolisis [9], atomic layer deposition [10], chemical bath deposition [11] or electrodeposition [12]. In sol-gel technique, needs expensive precursors such as alkoxide or organometallic compounds.…”
Section: Imentioning
confidence: 99%
“…One can deposit almost all the oxide semiconductors by adjusting the spray deposition parameters such as precursor properties 9 , substrate temperature 10 , flow rate…”
Section: Introductionmentioning
confidence: 99%
“…Nowadays, ZnO thin films have been under extensive investigation for reliable optoelectronic device manufacturing. ZnO thin films have been grown by various methods, such as rf sputtering [5], PLD [6], spray pyrolysis [7], * E-mail: mufazzalmunirah@gmail.com sol-gel [8]. Sol-gel method is found to be the most suitable for the growth of ZnO thin films, as it allows fabrication of thin films with improved structural, optical and electrical properties.…”
Section: Introductionmentioning
confidence: 99%