ZnO/ZnO:Al window and contact layer for thin film solar cells: high rate deposition by simultaneous RF and DC magnetron sputtering

Ellimer, K.; Wendt, R.; Cebulla, R.

doi:10.1109/pvsc.1996.564269

Cited by 1 publication

(2 citation statements)

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“…Low deposition rate that arises in RF sputtering technique is due to the number of cycles involved during deposition where RF sputtering only deposits in the second cycle of the AC supply. However, RF sputtered films are found to be more conductive with improvements in opencircuit voltage (V oc ) and short circuit current (I sc ) [90]. A desirable Mo back contact for CIGS solar cells is addressed to conductive, stress-free, well-adherent, uniform, and crystalline molybdenum (Mo) thin films with preferred orientation (110) on large area glass substrates [91].…”

Section: Different Deposition Techniques' Influence On the Propertiesmentioning

confidence: 99%

“…A combination mode of both sputtering techniques to form multilayer molybdenum (DC/RF) can be realised to optimise the Mo back contact accordingly. The potential of simultaneous DC and RF sputtering on Mo deposition can also be examined as this technique has been used by employing an induction coil in the DC path (to avoid short circuit to the RF voltage) for depositing ZnO/ZnO:Al window and contact layer with an improvement in V oc and I sc [90] (Table 3).…”

Section: Different Deposition Techniques' Influence On the Propertiesmentioning

confidence: 99%

See 1 more Smart Citation

Review on Substrate and Molybdenum Back Contact in CIGS Thin Film Solar Cell

Ong

Ramasamy

Maniscalco

et al. 2018

International Journal of Photoenergy

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Copper Indium Gallium Selenide- (CIGS-) based solar cells have become one of the most promising candidates among the thin film technologies for solar power generation. The current record efficiency of CIGS has reached 22.6% which is comparable to the crystalline silicon- (c-Si-) based solar cells. However, material properties and efficiency on small area devices are crucial aspects to be considered before manufacturing into large scale. The process for each layer of the CIGS solar cells, including the type of substrate used and deposition condition for the molybdenum back contact, will give a direct impact to the efficiency of the fabricated device. In this paper, brief introduction on the production, efficiency, etc. of a-Si, CdTe, and CIGS thin film solar cells and c-Si solar cells are first reviewed, followed by the recent progress of substrates. Different deposition techniques’ influence on the properties of molybdenum back contact for CIGS are discussed. Then, the formation and thickness influence factors of the interfacial MoSe2 layer are reviewed; its role in forming ohmic contact, possible detrimental effects, and characterization of the barrier layers are specified. Scale-up challenges/issues of CIGS module production are also presented to give an insight into commercializing CIGS solar cells.

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Section: Different Deposition Techniques' Influence On the Propertiesmentioning

confidence: 99%

Section: Different Deposition Techniques' Influence On the Propertiesmentioning

confidence: 99%