This work studies the products of plasma polymerized (NPCl2)3, (NPCl2)4 and (NPF2)3. Reaction products were examined by the 31P‐NMR, LDI‐TOF MS, DIP‐MS, IR and XPS. To achieve a successful reaction of (NPCl2)4 it is crucial that the phosphazene is carefully heated to a temperature of about 60 °C. Analysis demonstrated that products of plasma polymerization are similar for all halogenophosphazenes and mainly consist of branched chains. The best homogeneity, adhesion to substrate and also easiest substitution of halogen atoms by nucleophilic reagents was achieved with plasma polymerized (NPF2)3. Prepared polymers could be used for surface improvement and as flame‐retardants.