Диэлектрические И Пироэлектрические Свойства Композитов На Основе Нитридов Алюминия И Галлия, Выращенных Методом Хлорид-Гибридной Эпитаксии На Подложке Карбида Кремния На Кремнии

Solnyshkin, A. V.; Сергеева, О.Н.; Шустова, О.А.; Sharofidinov, Sh. Sh.; Старицын, М. В.; Каптелов, Е.Ю.; Кукушкін, С. А.; Пронин, И. П.

doi:10.21883/pjtf.2021.09.50898.18673

Письма В Журнал Технической Физики

2021

DOI: 10.21883/pjtf.2021.09.50898.18673

|View full text |Cite

Диэлектрические И Пироэлектрические Свойства Композитов На Основе Нитридов Алюминия И Галлия, Выращенных Методом Хлорид-Гибридной Эпитаксии На Подложке Карбида Кремния На Кремнии

A. V. Solnyshkin¹,

О.Н. Сергеева²,

О.А. Шустова³

et al.

Abstract: The microstructure, dielectric, and pyroelectric properties of AlxGa1-xN composite epitaxial layers grown on SiC / (111) Si substrates by chloride-hydride epitaxy are studied. In the process of layer growth, the phenomenon of spontaneous formation of heterojunctions was discovered. Based on AlxGa1-xN epitaxial layers, a material has been obtained which currently has one of the highest pyroelectric coefficients for crystals (or thin films) of aluminum nitride.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2023

Publication Types

Select...

Article2

Relationship

Self Cite0

Independent2

Authors

Journals

Cited by 2 publications

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Dynamics of potential difference changes in a biocomposite microsection for different temperature gradients

Kamalova,

Matveev,

Evsikova

et al. 2023

Izvestiâ Akademii nauk SSSR. Seriâ fizičeskaâ

View full text Add to dashboard Cite

The method of formalized modeling revealed the complex nature of the dependence of the parameters of the process of rearrangement of the biocomposite microstructure on the temperature gradient. Based on the analysis of the dynamics of changes in the potential difference formed along the thickness of the birch wood microcut, the parameters of the biocomposite polarization process for various temperature gradients have determined.

show abstract

Dynamics of potential difference changes in a biocomposite microsection for different temperature gradients

Kamalova,

Matveev,

Evsikova

et al. 2023

Izvestiâ Akademii nauk SSSR. Seriâ fizičeskaâ

View full text Add to dashboard Cite

show abstract

Nanoindentation of AlGaN Films Formed on SiC/Si Substrates Grown by the Method of Coordinated Substitution of Atoms

Grashchenko,

Kukushkin,

Osipov

et al. 2023

Izvestiâ Rossijskoj akademii nauk. Mehanika tverdogo tela

View full text Add to dashboard Cite

In this article, the mechanical and deformation characteristics of epitaxial films of AlGaN solid solutions formed on silicon substrates of crystallographic orientations (001), (011) and (111) with a silicon carbide (SiC/Si) buffer layer synthesized by the method of the coordinated substitution of atoms were studied using the nanoindentation method. The growth of AlGaN epitaxial layers were carried out both directly on the SiC/Si hybrid substrate and on the SiC/Si substrate additionally coated with an AlN buffer layer. The morphology and structure of the surface of the layers was studied by atomic force microscopy. The structural characteristics of hybrid AlGaN substrates and films grown with and without an aluminum nitride buffer layer were measured. An unambiguous relationship has been established between the mechanical properties (elasticity modulus and hardness) and the surface structure of AlGaN films. It has been found that the AlN buffer layer has a significant effect on the mechanical and deformation properties of AlGaN films at the initial moment of indentation, when the layer is predominantly elastically deformed. The roughness was determined and the surface morphology of the AlGaN films was characterized. For the first time, experimentally, using the nanoindentation method, the hardness parameters and the reduced modulus of elasticity of epitaxial AlGaN grown on hybrid SiC/Si and AlN/SiC/Si substrates were measured.

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Cited by 2 publications

References 0 publications

Dynamics of potential difference changes in a biocomposite microsection for different temperature gradients

Dynamics of potential difference changes in a biocomposite microsection for different temperature gradients

Nanoindentation of AlGaN Films Formed on SiC/Si Substrates Grown by the Method of Coordinated Substitution of Atoms

Contact Info

Product

Resources

About