2017
DOI: 10.32362/2500-316x-2017-5-3-22-40
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Наноструктурированные Углеродные Материалы В Эмиссионной Электронике

Abstract: This paper considers the influence of formation conditions on the composition and structure of polycluster diamond films, diamond-like carbon films and carbon nanowalls. Polycluster diamond films were obtained from a gas mixture of hydrogen and methane activated with arc and microwave discharges as well as by applying heat (i.e. hot-wire method). Diamond-like carbon films were obtained by using the methods of high-frequency magnetron sputtering, high-frequency diode discharge in a gas mixture of cyclohexane an… Show more

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Cited by 2 publications
(1 citation statement)
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“…There is some C-sp 3 -peak shiftcenter (up to ~ 0.3 eV) towards higher energies as well as the reduction of this peak half-width at N B increase in CC. It can be connected with the presence of more than one heterophase forming the structure in CC [15], as well as the development of competing forming processes in the coating layer of carbide compounds and boron oxide.…”
Section: Experimental Results and Their Discussionmentioning
confidence: 99%
“…There is some C-sp 3 -peak shiftcenter (up to ~ 0.3 eV) towards higher energies as well as the reduction of this peak half-width at N B increase in CC. It can be connected with the presence of more than one heterophase forming the structure in CC [15], as well as the development of competing forming processes in the coating layer of carbide compounds and boron oxide.…”
Section: Experimental Results and Their Discussionmentioning
confidence: 99%