Arrays of ZnO microcrystals were grown on a silicon substrate (111) by applying the vapor deposition method with the vapor-liquid-crystal mechanism, where the liquid phase was gold. Differences in the obtained crystals at growth times of 5, 10, and 15 minutes are described. The lattice parameters of the microcrystals were calculated as the growth time increased: a = 3.316, c = 5.281; a = 3.291, c = 5.270; a = 3.286, c = 5.258 Å. The change in Au content in the microcrystals as they grew was determined, from 0.520 at. % at the substrate to 0.035 at. % on the crystal surfaces after 15 minutes of growth. Maps of the atomic element distribution are presented, and an the differences in lattice parameters of the obtained crystals compared to standard values are explained.