基于离轴三反光学系统的高分辨率中阶梯光栅光谱仪

Zengpeng, 杨增鹏 Yang; Zhengyan, 李政言 Li; Enchang, 浦恩昌 Pu; Lisong, 闫力松 Yan; Chenyue, 汪陈跃 Wang; Lüji, 陈吕吉 Chen; Ping, 李萍 Li; Weiping, 杨卫平 Yang; Yang, 张洋 Zhang

doi:10.3788/aos202141.2212001

光学学报

2021

DOI: 10.3788/aos202141.2212001

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基于离轴三反光学系统的高分辨率中阶梯光栅光谱仪

杨增鹏 Yang Zengpeng¹,

李政言 Li Zhengyan²,

浦恩昌 Pu Enchang³

et al.

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Cited by 6 publications

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紫外光刻-湿法刻蚀硅中阶梯光栅的研制

Yang Zijiang,

Pan Qiao,

Zhu Jiacheng

et al. 2023

光学学报

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Objective The echelle grating, with a high spectral resolution and large angular dispersion, is the core component of highresolution spectrometers. The main preparation method of echelle grating is mechanical holographic lithography combined with ion beam etching and wet etching. The gratings by the traditional mechanical method have a high cost, a rough groove surface, and a Roland ghost. The holographic lithography combined with ion beam etching can hardly

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紫外光刻-湿法刻蚀硅中阶梯光栅的研制

Yang Zijiang,

Pan Qiao,

Zhu Jiacheng

et al. 2023

光学学报

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基于平面光波导的二维色散系统

Jia Shengping,

Lu Shun,

Tan Zhongwei

2023

光学学报

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Aotf与中阶梯光栅结合的小型化超光谱分辨率成像光谱仪

Zhang Lei,

Li Bo,

Gu Guochao

et al. 2023

光学学报

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基于离轴三反光学系统的高分辨率中阶梯光栅光谱仪

Cited by 6 publications

References 0 publications

紫外光刻-湿法刻蚀硅中阶梯光栅的研制

紫外光刻-湿法刻蚀硅中阶梯光栅的研制

基于平面光波导的二维色散系统

Aotf与中阶梯光栅结合的小型化超光谱分辨率成像光谱仪

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