Ion photon emission in the wavelength range of 280 - 420 nm resulting from 5 Kr+ ion beam sputtering from titanium in the presence and the absence of oxygen was studied experimentally. The observed spectra consist of a series of discrete lines superimposed with a broadband continuum. Discrete lines are attributed to excited neutral Ti I and excited ions Ti II. The differences in the observed intensities of spectral lines are discussed in terms of the electron-transfer processes between the excited sputtered atom and electronic levels of the solid. The radiative dissociation process and breaking of chemical bonds seem to contribute to the enhancement of emitted photons intensity. Continuum radiation was observed and is very probably related to the electronic structure of titanium. The collective deactivation of 3d-shell electrons appears to play a role in the emission of this radiation.

The sputtering of vanadium particles at normal incidence wassimulated. The SRIM-code combined to a new ANGULAIR and SDTrimSPsimulation was employed to obtain the sputtering yields and the angular distribution of the atoms. The simulation was made for a large number of incident Kr+ions with 5 keV energy, letting the computer count the number of emitted particles in the solid angle. The angular distribution of differential sputtering yields of vanadium shows an over-cosine tendency.

Iron, chromium and aluminum particles sputtered under 5 keV by Kr + ion bombardment at normal incidence from the ternary alloy Fe82Cr6Al12 was simulated. The Stopping and Range of Ions in Matter (SRIM) software combined to a new code-program, called Angulaire, were used to obtain the sputtering yields and angular distributions of the ejected species. The simulation was performed for a large number of incident ions (about 2 × 10 5 ions) and the number of particles emitted in the solid angle corresponding to the probe was counted by a computer. The angular distributions of sputtered particles were compared with the results available in the literature and showed a reasonable agreement. Furthermore, we have demonstrated that the angular distribution of the differential sputtering yields of all ejected species (iron, aluminum, and chromium) from the ternary alloy exhibited an over-cosine tendency.

Angular distributions of atoms sputtered from a copper target under 5‐keV Kr+ bombardment at normal incidence were simultaneously and independently studied by experiments and computer simulation. The sputtered particles are collected on a Mylar™ foil placed around the target. Deposited particles on the substrate were analyzed by optical transmission spectroscopy. The surface roughness of the irradiated target was studied by atomic force microscopy, surface profilometry, and scanning electron microscopy. The experimental results were compared with the simulated angular distributions (programs OKSANA, SDTrimSP, and SRIM) and were found to be in reasonable agreement. In all cases, the angular distribution of sputtered particles showed an over‐cosine shape, which may be associated with noncompensated scattering of ejected particles by surface atoms when exiting the target. The results obtained are compared with the data from the literature.