This study discusses the main features of the irradiation of prospective multilayer coatings by VUV/UV radiation from compressed plasma flows. Such radiation is characterized by a broadband spectrum and high brightness fluxes. Oxide and Mo/Si bilayers were used as the basis of the reflective multilayers for the visible and UV ranges. A gas-dynamic response from the irradiated surfaces was studied with schlieren photography. The properties of original and irradiated multilayers were described with ultra violet visible infrared spectroscopy (UV-Vis-IR), X-ray diffraction (XRD), X-ray reflectometry, scanning electron microscopy (SEM) and other techniques. Data on the degradation of optical properties and surface morphology were obtained.

The possibility of effective band-reject filtration of intense spectral lines in Xray spectra and the creation of deep spectral valleys in the continuous spectrum by diffraction extinction was shown. Optimum material for band-reject filters in the energy range E > 6 keV is highly oriented pyrolytic graphite (HOPG). The filtering scheme in the form of an echelon arrangement of HOPG films is proposed, which suppresses the negative effect of multiple reflections due to diffraction extinction. The full width at half minimum of the spectral valleys can vary from tens of electronvolt to several kiloelectron volt depending on the HOPG mosaic spread, HOPG filters arrangement, and rejected energy region. At the energy range E of~10 keV, the spectral density attenuation value may be of order 10 −3 and lower. The obtained results can be used in various fields of X-ray spectrometry, as well as in static energy dispersive diffractometry and reflectometry. K E Y W O R D Sband rejection, HOPG, mosaic structures, X-ray extinction, X-ray filter

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The paper presents some results of experimental studies of Mo/Si multilayer degradation under UV exposure from compressed plasma jets in air. Such high current plasma flows generate broadband powerful UV radiation fluxes. A single exposure caused a slight decrease of reflectivity from 0.54 to 0.47 due to the coating contamination by the debris from the plasma light emitter.