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The 'filter-fit' method, which was originaHy developed for the analysis of energy dispersive x-ray data, has been applied to the quantitative analysis of Auger spectra for the first time. It is a digital peak deconvolution technique in the presence of the continuum background using least-squares fitting calculations, including the prefiltering of spectra. To evaluate this method, composite-known spectra digitally composed of Cr, 0 and Ni standard spectra were prepared. For the deconvolution of Cr and 0 peaks under the influence of the Ni peak tail, the present method showed remarkable advantage over the conventional least-squares fitting without prefiltering. As a digital filter for prefiltering, derivative filters of different orders and 'top-hat' filter were examined. In derivative filters, it was found that there is an optimum order in the balance of advantage of suppressing the background and disadvantage of losing peak intensity. The 'top-hat' filter is a very practical filter in both background suppression and noise attenuation.