Hyperspectral imaging has important benefits in remote sensing and material identification. This paper describes a class of hyperspectral imaging systems which utilize a novel optical processor that provides video-rate hyperspectral datacubes. These systems have no moving parts and do not operate by scanning in either the spatial or spectral dimension. They are capable of recording a full three-dimensional (two spatial, one spectral) hyperspectral datacube with each video frame, ideal for recording data on transient events, or from unstabilized platforms. We will present the results of laboratory and field-tests for several of these imagers operating in the visible, near-infrared, mid-wavelength infrared (MWIR) and long-wavelength infrared (LWIR) regions.

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The Stepper Image Monitor(SIM) system tests the resolution and overlay performance of complete stepper systems by measuring the aerial image intensity profile at many wafer locations and focus offsets. Overlay error vectors can be measured with a precision of .021.ím and best focus can be determined to a precision of 0.111m without exposing test wafers. New data will be presented on lens heating effects, along with a simple model. Imagery of high NA steppers will be explored by observing image profiles of various sub -micron lines. A new poly -on -oxide process to fabricate permanent SIM reference wafers will be described. This paper will describe other recent developments which have made SIM techniques broadly applicable to many practical problems of stepper setup and characterization.

Objective. Present methods for assessing color vision require the person’s active participation. Here we describe a brain-computer interface-based method for assessing color vision that does not require the person’s participation. Approach. This method uses steady-state visual evoked potentials to identify metamers—two light sources that have different spectral distributions but appear to the person to be the same color. Main results. We demonstrate that: minimization of the visual evoked potential elicited by two flickering light sources identifies the metamer; this approach can distinguish people with color-vision deficits from those with normal color vision; and this metamer-identification process can be automated. Significance. This new method has numerous potential clinical, scientific, and industrial applications.