The results of experimental studies of the transients’ parameters during the operation of a high-precision drive with a closed-loop control, which at the same time is an active damper, are presented. The amplitude-frequency characteristics of the damper and the vibration-isolating platform in semi-active mode based on four dampers and four elastic suspension assemblies are also shown.

Modern equipment requires precise movement of objects both at atmospheric pressure and in vacuum conditions. Moreover, vacuum equipment is subjected to a number of external disturbances that adversely affect the manufacturing process and have a direct impact on the quality of manufactured products. A promising development in this area is actuators based on dielectric elastomers, characterized by a short reaction time (milliseconds) and a simple and cheap implementation. Successful implementation depends on an understanding of its behavior and properties, depending on the choice of matrix and filler materials. Most often, expensive barium titanate is used as a filler. This paper discusses the use of quartz as a cheaper filler.

Research conducted in a vacuum requires high accuracy, but multiple vibrational and shock disturbing effects adversely affect the results. To increase the accuracy, it is possible to install a vibration isolation system in a vacuum chamber. One of the promising areas of active vibration isolation is the use of intelligent materials in them, including magnetorheological elastomer (MRE). Since most studies need to be carried out in a high and ultra-high vacuum environment, it is necessary to know the degree of influence of the MRE gas release on the quality of the operation environment. Thus, the aim of the work was to analyze the spectrum of released gases during degassing of the polymer (MRE) in vacuum at room and elevated temperatures. It was found that increased gas evolution from the studied polymer sample with increasing temperature does not allow to achieve high vacuum (1,7 · 10−3 Torr). We also identified that gases with the highest partial pressures are part of the atmospheric air; there are other gases not analyzed that significantly affect the total pressure (have a pressure of the order of 10−3 – 10−4 Torr).

The use of a magnetorheological elastomer (a polymer) in an active vibration isolation system is considered. The best combination and concentrations of such elastomers are determined for vibration isolation systems operating in vacuum.

Magnetorheological elastomer is used in vibration isolation and damping systems; it is promising to use a platform of active vibration isolation in a vacuum to provide vibration protection for the research object. Polymer is a composite material whose rheological properties can change under the influence of a directed magnetic field. For the correct operation of the platform, the constancy of mechanical properties is necessary, which can change during degassing with increasing temperature. The paper presents the results of studies of the mechanical properties of MRE with various compositions prior to degassing in a vacuum. It was found that the elastic modulus of the polymer directly depends on the concentration of filler particles, and no dependence on the presence of surfactants was found.