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A m -In this paper a numerical model of a general purpose instrument IO measure the electrical properties ~Jsemiconductor devices is presented Numerical simulation results are compared with experimental data and it is shown that lhe model can accurately describe the equipment behavior. As a consequence it can be used to correct systematic errors increasing Ihe accuracy of the instrument results.instrument, allows the implementation of an error correction technique that greatly enhances the accuracy of the results. II. THE MEASUREMENT INSTRUMENTThe HP414OB includes a pA meter and programmable DC voltaee sources. The DA meter can measure currents from