The loss factor (tan δ) of ferroelectric material at microwaves and the tunability (n) defined as a ratio of the dielectric permittivity at zero dc field to the dielectric permittivity at the given field are strongly connected with the softness of so-called ferroelectric soft mode. The loss factor and the tunability are generalized by the commutation quality factor (CQF). The dielectric response of a ferroelectric material allows one to determine the CQF and to compare it to the theoretical CQF obtained for a perfect ferroelectric sample. In order to compare the theoretical prediction and experimental data, the influence of deposition parameters on microwave properties of BaxSr1−xTiO3 (BSTO) films deposited on sapphire and alumina substrate has been investigated in a wide frequency range (1–30 GHz). The highest CQF at room temperature was obtained for the 30% Ba content target and the deposition temperature 905 °C. The best BSTO films exhibited CQF≅1.6×104 with n=2.1 and tan δ=0.012 at 1 GHz and zero bias. This result is among the best reported for sputtered BSTO films both on sapphire and alumina substrates. Nevertheless the obtained CQF is 3–5 times lower than the upper theoretical limit.
Articles you may be interested inModification of energy band alignment and electric properties of Pt/Ba0.6Sr0.4TiO3/Pt thin-film ferroelectric varactors by Ag impurities at interfaces Suppression of slow capacitance relaxation phenomenon in Pt/Ba0.3Sr0.7TiO3/Pt thin film ferroelectric structures by annealing in oxygen atmosphere Appl. Phys. Lett.The effects of ultraviolet ͑UV͒ irradiation on the relaxation processes in Ba 0.3 Sr 0.7 TiO 3 thin film capacitors were experimentally investigated in a range of wavelengths = ͑310-400͒ nm. It was observed that irradiation with a specific wavelength reduces the time of slow capacitance relaxation up to three orders of magnitude in comparison with relaxation time in the "dark" regime. It was also observed that at a certain wavelength of UV irradiation there was a maximum in the leakage current of the capacitors. This wavelength corresponded exactly with a minimum in the relaxation time of the capacitance. It was shown that the decrease in the ferroelectric film thickness resulted in a shift in ͑͒minima and I͑͒maxima towards the shorter wavelengths. Phenomena observed are analyzed using Bouguer's law.
Thin ferroelectric barium strontium titanate (BST) layers of high structure quality have been grown for the first time directly on semi-insulating silicon carbide substrates by RF magnetron sputtering of a ceramic target. The structural and microwave properties of the films were substantially improved by an intermediate annealing of the layers during the growing process. Prepared under this approach, BST films have a well-formed crystal structure, which has a positive effect on their electrical properties, specifically on nonlinearity and dielectric losses. Planar capacitors based on these BST films demonstrate the best combination of high tunability and low losses for BST/SiC structures at microwaves.
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