Metasurfaces offer the possibility to shape optical wavefronts with an ultracompact, planar form factor. However, most metasurfaces are static, and their optical functions are fixed after the fabrication process. Many modern optical systems require dynamic manipulation of light, and this is now driving the development of electrically reconfigurable metasurfaces. We can realize metasurfaces with fast (>105 hertz), electrically tunable pixels that offer complete (0- to 2π) phase control and large amplitude modulation of scattered waves through the microelectromechanical movement of silicon antenna arrays created in standard silicon-on-insulator technology. Our approach can be used to realize a platform technology that enables low-voltage operation of pixels for temporal color mixing and continuous, dynamic beam steering and light focusing.

Metasurfaces provide unprecedented control over light propagation by imparting local, space-variant phase changes on an incident electromagnetic wave. They can improve the performance of conventional optical elements and facilitate the creation of optical components with new functionalities and form factors. Here, we build on knowledge from shared aperture phased array antennas and Si-based gradient metasurfaces to realize various multifunctional metasurfaces capable of achieving multiple distinct functions within a single surface region. As a key point, we demonstrate that interleaving multiple optical elements can be accomplished without reducing the aperture of each subelement. Multifunctional optical elements constructed from Si-based gradient metasurface are realized, including axial and lateral multifocus geometric phase metasurface lenses. We further demonstrate multiwavelength color imaging with a high spatial resolution. Finally, optical imaging functionality with simultaneous color separation has been obtained by using multifunctional metasurfaces, which opens up new opportunities for the field of advanced imaging and display.

Subwavelength, high-refractive index semiconductor nanostructures support optical resonances that endow them with valuable antenna functions. Control over the intrinsic properties, including their complex refractive index, size, and geometry, has been used to manipulate fundamental light absorption, scattering, and emission processes in nanostructured optoelectronic devices. In this study, we harness the electric and magnetic resonances of such antennas to achieve a very strong dependence of the optical properties on the external environment. Specifically, we illustrate how the resonant scattering wavelength of single silicon nanowires is tunable across the entire visible spectrum by simply moving the height of the nanowires above a metallic mirror. We apply this concept by using a nanoelectromechanical platform to demonstrate active tuning.

Diameter-dependent Raman scattering in single tapered silicon nanowires is measured and quantitatively reproduced by modeling with finite-difference time-domain simulations. Single crystal tapered silicon nanowires were produced by homoepitaxial radial growth concurrent with vapor-liquid-solid axial growth. Multiple electromagnetic resonances along the nanowire induce broad band light absorption and scattering. Observed Raman scattering intensities for multiple polarization configurations are reproduced by a model that accounts for the internal electromagnetic mode structure of both the exciting and scattered light. Consequences for the application of Stokes to anti-Stokes intensity ratio for the estimation of lattice temperature are discussed.

Nanomechanical resonators provide a compelling platform to investigate and exploit phase transitions coupled to mechanical degrees of freedom because resonator frequencies and quality factors are exquisitely sensitive to changes in state, particularly for discontinuous changes accompanying a first-order phase transition. Correlated scanning fiber-optic interferometry and dual-beam Raman spectroscopy were used to investigate mechanical fluctuations of vanadium dioxide (VO2) nanowires across the first order insulator to metal transition. Unusually large and controllable changes in resonator frequency were observed due to the influences of domain wall motion and anomalous phonon softening on the effective modulus. In addition, extraordinary static and dynamic displacements were generated by local strain gradients, suggesting new classes of sensors and nanoelectromechanical devices with programmable discrete outputs as a function of continuous inputs.