Chemical Vapor Deposition merupakan metode deposisi yang digunakan untuk menghasilkan bahan padat berkualitas tinggi dan berkinerja tinggi yang biasanya dibawah vakum. Tujuan review ini adalah untuk mengetahui proses dan teknik dari Chemical Vapor Deposition. Prinsip kerja dari Chemical Vapor Deposition yaitu proses pengendapan senyawa/ unsur terjadi akibat reaksi dekomposisi kimia akibat aktivasi termal di seputar komponean yang dilapisi. Beberapa material yang dihasilkan dengan menggunakan metode Chemical Vapor Deposition ini adalah berlian sintesis, thin film coating, lapisan emas dengan ketebalan yang tipis.
The purpose of this study is to produce a discovery learning based e-module on buffer solution topic for Class XI Senior High School (SMA/MA). The type of research used is Research and Development using 4-D models with 4 stages, namely: (1) define, (2) design, (3) develop and (4) disseminate. This e-module was validated by 2 Chemistry lecturer from FMIPA UNP and 3 Chemistry teachers at Pertiwi 1 Padang High School, while the practicality test was carried out by 2 chemistry teachers and 26 students of class XII MIA SMA Pertiwi 1 Padang. The validity and practicality data were analysed using the kappa cohen formula, the validity was 0.92 very high and the practicality of teachers and students was 0.94 and 0.83 very high. The data proves that the Buffer Solution e-module can be said to be valid and practical
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