This paper describes improvement of the fill factor of Schottky-barrier infrared CCD arrays by using a meander-channel CCD (MCCD) as both the vertical and the horizontal readout registers. A 64 X 64 element monolithic Schottky-barrier infrared meander channel CCD(SB-IRMCCD) with 23 percent fill factor has been fabricated with negligible element to element cross talk. This letter also describes how a fill factor of 57 percent is possible by decreasing the area of the vertical MCCD register to 30 percent of that in the present device.

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This paper describes a new configuration for a Schottky barrier IRCCD (SB-IRCCD). This device utilizes a Meander Channel CCD (MCCD) for both the vertical and horizontal readout registers.The MCCD has simple electrode configuration consisting of two straight gate electrodes over the meander channel without bus lines and contact holes. This simple electrode configuration increases the fill factor of SB -IRCCD and results in the improvement of its photoresponse.In addition, the versatile electrode configuration of the MCCD simplifies connection (in corner turns) between the vertical and horizontal readout registers.A 64 x 64-element monolithic Schottky barrier infrared meander channel CCD (SB-IRMCCD) with a 23 % fill factor was fabricated with a relaxed 10 pm design rule. This paper also discuss how a fill factor of 57 % will be possible by decreasing the area of the vertical MCCD register to 30 % of the present device.