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We investigated transient photoresponse and Hall effect in amorphous In-Ga-Zn-O thin films and observed a stretched exponential response which allows characterization of the activation energy spectrum with only three fit parameters. Measurements of as-grown films and 350 K annealed films were conducted at room temperature by recording conductivity, carrier density, and mobility over day-long time scales, both under illumination and in the dark. Hall measurements verify approximately constant mobility, even as the photoinduced carrier density changes by orders of magnitude. The transient photoconductivity data fit well to a stretched exponential during both illumination and dark relaxation, but with slower response in the dark. The inverse Laplace transforms of these stretched exponentials yield the density of activation energies responsible for transient photoconductivity. An empirical equation is introduced, which determines the linewidth of the activation energy band from the stretched exponential parameter b. Dry annealing at 350 K is observed to slow the transient photoresponse. V

Quasi-reversible oxygen exchange/point defect relaxation in an amorphous In-Ga-Zn-O thin film was monitored by in situ electrical property measurements (conductivity, Seebeck coefficient) at 200 °C subjected to abrupt changes in oxygen partial pressure (pO2). By subtracting the long-term background decay from the conductivity curves, time-independent conductivity values were obtained at each pO2. From these values, a log-log “Brouwer” plot of conductivity vs. pO2 of approximately −1/2 was obtained, which may indicate co-elimination (filling) of neutral and charged oxygen vacancies. This work demonstrates that Brouwer analysis can be applied to the study of defect structure in amorphous oxide thin films.

To exploit the full potential of multicomponent wide-bandgap oxides, an in-depth understanding of the complex defect chemistry and of the role played by the constituent oxides is required. In this work, thorough theoretical and experimental investigations are combined in order to explain the carrier generation and transport in crystalline InGaZnO4. Using first-principles density functional approach, we calculate the formation energies and transition levels of possible acceptor and donor point defects as well as the implied defect complexes in InGaZnO4 and determine the equilibrium defect and electron densities as a function of growth temperature and oxygen partial pressure. An excellent agreement of the theoretical results with our Brouwer analysis of the bulk electrical measurements for InGaZnO4 establishes the Ga antisite defect, GaZn, as the major electron donor in InGaZnO4. Moreover, we show that the oxygen vacancies, long believed to be the carrier source in this oxide, are scarce. The proposed carrier generation mechanism also explains the observed intriguing behavior of the conductivity in In-rich vs Ga-rich InGaZnO4.

The dominant point defect mechanism of amorphous (a‐) indium zinc oxide (IZO) was probed through in situ electrical characterization of sputtered a‐IZO thin films in response to changes in oxygen partial pressure (pO2) at 300∘C. The results yielded a power law dependence of conductivity (σ) versus pO2 of ∼−1/6. This experimental method, known as Brouwer analysis, confirms doubly‐charged oxygen vacancies as the dominant defect species in a‐IZO. The success of this study suggests that Brouwer analysis is a viable method for studying the defect mechanisms of amorphous oxides.