point defects, imperfections, and higher dimensional extended defects are known to severely impact the overall functional properties. [3,4] As a matter of example, oxygen vacancies were shown to enhance oxygen conductivity in oxide-ion electrolytes [5] or to boost oxygen incorporation and catalytic activity in mixed ionic electronic conductors (MIECs) [6,7] while weakening electronic and magnetic order in ferromagnetic oxides. [8] Besides, the presence of heterogeneous and homogenous interfaces in thin films was shown to drastically impact defect concentrations in such layers, which gives rise to deviations from bulk defect chemistry and, eventually, to new and unexpected properties. [9-11] Therefore, the knowledge and quantification of the chemical reactions that dominate the defect concentration in oxide thin films (i.e., defect chemistry) is essential for understanding the material behavior and for engineering their properties. This is especially relevant at intermediate-to-low temperatures (below 500 °C), where a high electrochemical activity and the nanometric dimensions of the thin films allow the point defect equilibrium with the environment, [12] hampering the use of the high temperature defect chemistry model from the bulk counterpart. A paradigmatic example of the large effect of point defects on the functional properties of transitional metal oxides can be found in the La 1−x Sr x FeO 3−δ (LSF) model family. LSF compounds crystalize in a perovskite ABO 3 structure and find application in many renewable energy technologies, such as solid oxide fuel cells (SOFC), [13] or electrochemical and photoelectrochemical water splitting. [14,15] In LSF, the substitution of trivalent La by divalent Sr gives rise to the generation of electronic holes and/or oxygen vacancies for electronic compensation, depending on the electrochemical equilibrium with the oxygen partial pressure of the environment. Interestingly, both point defects were found to be strongly correlated to many functional properties of LSF. For instance, the increase of holes concentration was found responsible for a large modification of the electronic structure, [16] affecting not just the electronic and magnetic transport properties [17] but also the oxygen evolution properties in aqueous media. [15] Meanwhile, oxygen vacancies were shown to take part into the rate-limiting step of oxygen incorporation at high temperature. [18] For these reasons, the development of a reliable and flexible in situ method for tracking the point defects of LSF thin films on any substrate and environment is fundamental for tailoring their properties. Unveiling point defects concentration in transition metal oxide thin films is essential to understand and eventually control their functional properties, employed in an increasing number of applications and devices. Despite this unquestionable interest, there is a lack of available experimental techniques able to estimate the defect chemistry and equilibrium constants in such oxides at intermediate-to-low temperatures. In ...