Tall,
crystalline carbon nanotubes (CNTs) are desired to successfully
integrate them in various applications. As the crystallinity of CNTs
improves with increasing growth temperatures, higher growth temperatures
are required to obtain crystalline CNTs. However, in a typical chemical
vapor deposition (CVD) process, CNT growth rate reduces when the growth
temperature exceeds a specific level due to the degradation of the
catalyst particles. In this study, we have demonstrated the improved
catalytic activity of nickel/ferrocene-hybridized catalyst as compared
to sole ferrocene catalyst. To demonstrate this, CNTs are grown on
bare silicon (Si) as well as nickel (Ni) catalyst-deposited substrates
using volatile catalyst source (ferrocene/xylene) CVD at the growth
temperatures ranging from 790 to 880 °C. It was found that CNTs
grown on bare Si substrate experience a reduction in height at growth
temperature above 860 °C, whereas the CNTs grown on 10 nm Ni
catalyst-deposited substrates experience continuous increase in height
as the temperature increases from 790 to 880 °C. The enhancement
in the height of CNTs by the addition of Ni catalyst is also demonstrated
on 5, 20, and 30 nm Ni layers. The examination of CNTs using electron
microscopy and Raman spectra shows that the additional Ni catalyst
source improves the CNT growth rates and crystallinity, yielding taller
CNTs with a high degree of structural crystallinity.
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